Metal–insulator–metal micro-capacitors for integrated energy storage up to 105 Hz

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2022-11, Vol.55 (45)
Hauptverfasser:	Hourdakis, E, Botzakaki, M A, Xanthopoulos, N J
Format:	Artikel
Sprache:	eng
Schlagworte:	3D nanostructuring energy storage micro-capacitors
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creator	Hourdakis, E Botzakaki, M A Xanthopoulos, N J
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doi_str_mv	10.1088/1361-6463/ac914a
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	3D nanostructuring energy storage micro-capacitors
title	Metal–insulator–metal micro-capacitors for integrated energy storage up to 105 Hz
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