Influence of metastable atoms in low pressure magnetized radio-frequency argon discharges

One-dimensional particle-in-cell simulations with Monte Carlo collisions are used to investigate the influence of metastable atoms in low pressure radio-frequency argon discharges with magnetic fields ranging from 0 G to 60 G. Two metastable levels of argon species are included and tracked as partic...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2020-10, Vol.53 (43), p.435201
Hauptverfasser:	Zheng, Bocong, Fu, Yangyang, Wen, De-qi, Wang, Keliang, Schuelke, Thomas, Hua Fan, Qi
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitively coupled plasma magnetic field metastable atoms particle-in-cell simulation
Online-Zugang:	Volltext
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