Erosion rates of diffuse and constricted magnetron discharges in helium over aluminium, gallium, molybdenum, and tantalum

Magnetically-enhanced discharge plasmas in light monatomic gases such as helium may have applicability in future electric power grid switches. For practical use of a gas discharge switch in power conversion the net cathode erosion rate must be sufficiently low to enable stable operation over an exte...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2019-10, Vol.52 (43), p.435203
Hauptverfasser:	Allen, Christopher A, Hitchon, W Nicholas G, Aceto, Steven C, Smith, David J, Sommerer, Timothy J, Trotter, Jason F, Lawler, James E
Format:	Artikel
Sprache:	eng
Schlagworte:	constricted diffuse erosion magnetized mode PHYSICS OF ELEMENTARY PARTICLES AND FIELDS plasma sputtering
Online-Zugang:	Volltext
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