Erosion rates of diffuse and constricted magnetron discharges in helium over aluminium, gallium, molybdenum, and tantalum

Magnetically-enhanced discharge plasmas in light monatomic gases such as helium may have applicability in future electric power grid switches. For practical use of a gas discharge switch in power conversion the net cathode erosion rate must be sufficiently low to enable stable operation over an exte...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2019-10, Vol.52 (43), p.435203
Hauptverfasser: Allen, Christopher A, Hitchon, W Nicholas G, Aceto, Steven C, Smith, David J, Sommerer, Timothy J, Trotter, Jason F, Lawler, James E
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container_issue 43
container_start_page 435203
container_title Journal of physics. D, Applied physics
container_volume 52
creator Allen, Christopher A
Hitchon, W Nicholas G
Aceto, Steven C
Smith, David J
Sommerer, Timothy J
Trotter, Jason F
Lawler, James E
description Magnetically-enhanced discharge plasmas in light monatomic gases such as helium may have applicability in future electric power grid switches. For practical use of a gas discharge switch in power conversion the net cathode erosion rate must be sufficiently low to enable stable operation over an extended life. We have found that magnetically-enhanced He plasmas at pressures of 200-800 mTorr can operate in one of several distinct modes that are characterized by the plasma geometry (diffuse, constricted) and motion (stationary, orbiting, slow). The erosion rates of various cathode materials (aluminium, gallium, molybdenum, and tantalum) were measured in both diffuse and constricted, magnetized He plasmas. The constricted orbiting (CO) mode exhibited a lower erosion rate than either the diffuse stationary or constricted slow modes, even when comparing loss rates against a cathode material that was more liable to sputter (e.g. aluminium versus molybdenum). However, the erosion rate for operation in the CO mode was still found to be significantly higher than required for practical use in a gas discharge switch.
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subjects constricted
diffuse
erosion
magnetized
mode
PHYSICS OF ELEMENTARY PARTICLES AND FIELDS
plasma
sputtering
title Erosion rates of diffuse and constricted magnetron discharges in helium over aluminium, gallium, molybdenum, and tantalum
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