Potassium ions in SiO2: electrets for silicon surface passivation

This manuscript reports an experimental and theoretical study of the transport of potassium ions in thin silicon dioxide films. While alkali contamination was largely researched in the context of MOSFET instability, recent reports indicate that potassium ions can be embedded into oxide films to prod...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2018-01, Vol.51 (2)
Hauptverfasser:	Bonilla, Ruy S, Wilshaw, Peter R
Format:	Artikel
Sprache:	eng
Schlagworte:	dielectric coating field effect ionic conductivity potassium ion electret silicon surface passivation
Online-Zugang:	Volltext
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