Characterization of argon dielectric barrier discharges applied to ethyl lactate plasma polymerization

The influence of the input voltage frequency (35 and 150 kHz), interelectrode gap (1 and 2 mm) and precursor concentration (250, 350, and 450 ppm) on the electron temperature (Te), number density of metastable Ar atoms (n(Arm)), and discharge current density (proportional to the electron density ne)...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2017-11, Vol.50 (47), p.475205
Hauptverfasser:	Laurent, Morgane, Desjardins, Edouard, Meichelboeck, Maximilian, Naudé, Nicolas, Stafford, Luc, Gherardi, Nicolas, Laroche, Gaétan
Format:	Artikel
Sprache:	eng
Schlagworte:	argon metastable current density dielectric barrier discharge electron temperature Engineering Sciences ethyl lactate optical emission spectroscopy
Online-Zugang:	Volltext
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