Aspect ratio optimization of piezoelectric extensional mode resonators for quality factor and phase noise performance enhancement

This study focuses on optimizing the resonator geometry via the aspect ratio design of a width-extensional mode resonator to improve its quality factor ( Q ), which is one of the critical performance parameters for resonators in either sensing (Allan deviation) or frequency reference (phase noise) a...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2024-11, Vol.34 (11), p.115003
Hauptverfasser:	Tang, Ken-Wei, Lin, Wei, Zope, Anurag A, Lin, Zhong-Wei, Li, Sheng-Shian
Format:	Artikel
Sprache:	eng
Schlagworte:	anchor loss oscillator piezoelectric MEMS quality factor resonator TPoS width extensional mode
Online-Zugang:	Volltext
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