Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

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Veröffentlicht in:	Journal of micromechanics and microengineering 2023-04, Vol.33 (4)
Hauptverfasser:	Zhou, Jie, Fan, Yuchen, Tong, Xin, Luo, Tiancheng, Liu, Jieyu, Zou, Yang, Liu, Wenjuan, Liu, Yan, Soon, Jeffrey Bo Woon, Cai, Yao, Sun, Chengliang
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Sprache:	eng
Schlagworte:	capacitance effective coupling coefficient electrode pitch laterally-excited bulk acoustic resonator quality factor
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subjects	capacitance effective coupling coefficient electrode pitch laterally-excited bulk acoustic resonator quality factor
title	Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator
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