Design and implementation of differential MEMS microphones using the two polysilicon processes for SNR enhancement

This study presents the design, fabrication and testing of the capacitive-type MEMS microphone with differential sensing electrodes to improve the sensitivity and signal-to-noise ratio (SNR). The microphone is designed and implemented based on an existing trench-refilled MOSBE process platform with...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2020-05, Vol.30 (5), p.55006
Hauptverfasser:	Lo, Sung-Cheng, Chan, Chun-Kai, Wu, Mingching, Fang, Weileun
Format:	Artikel
Sprache:	eng
Schlagworte:	condenser microphone differential sensing gap-closing trench-refilled two polysilicon fabrication processes
Online-Zugang:	Volltext
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