New insight into contradictive relationship between sensitivity and working bandwidth of cilium MEMS bionic vector hydrophone

Sensitivity and working bandwidth are two important features of cilium MEMS bionic vector hydrophone. However, in previous studies, they were mutually inhibited so that they could not be optimized simultaneously, which means that the method of increasing sensitivity would reduce the working bandwidt...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2019-11, Vol.29 (11), p.115016
Hauptverfasser:	Xu, Qingda, Zhang, Guojun, Zhao, Yujie, Wang, Renxin, Ding, Junwen, Zhang, Xiaoyong, Xue, Chenyang, Zhang, Wendong
Format:	Artikel
Sprache:	eng
Schlagworte:	MEMS sensitivity two-degree of freedom system vector hydrophone working bandwidth
Online-Zugang:	Volltext
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