Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays

Polymer microneedles that get resorbed after insertion in the body have several interesting applications, for example in the insertion of ultra-flexible electrode arrays in neural tissue. In this work, we explore the use of molds created by etching in (3 1 1) silicon as a basis for the fabrication o...

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Veröffentlicht in:	Journal of micromechanics and microengineering 2019-02, Vol.29 (2), p.27001
Hauptverfasser:	Ceyssens, Frederik, Welkenhuysen, Marleen, Puers, Robert
Format:	Artikel
Sprache:	eng
Schlagworte:	anisotropic etching dissolvable dissolving micromolding microneedles neural implants PLGA
Online-Zugang:	Volltext
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