RBS study of defect profiles in proton implanted LiNbo3

Single crystals of lithium niobate were implanted at room temperature with 20 keV protons at fluences ranging from 5 × 10 16 H + /cm 2 to 2 × 10 17 H + /cm 2 . Rutherford Backscattering Spectrometry in channeling geometry (RBS-C) performed at three beam energies (1, 1.5, and 2 MeV) and subsequent an...

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Veröffentlicht in:	Radiation effects and defects in solids 1995-12, Vol.136 (1-4), p.103-106
Hauptverfasser:	Salem, S. Ould, Canut, B., Moretti, P., Meddeb, J., Ramos, S. M. M., Thevenard, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties defects Defects and impurities in crystals microstructure Doping and impurity implantation in other materials Exact sciences and technology Implantation Niobate lithium Physics Structure of solids and liquids crystallography
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Beschreibung
Zusammenfassung:	Single crystals of lithium niobate were implanted at room temperature with 20 keV protons at fluences ranging from 5 × 10 16 H + /cm 2 to 2 × 10 17 H + /cm 2 . Rutherford Backscattering Spectrometry in channeling geometry (RBS-C) performed at three beam energies (1, 1.5, and 2 MeV) and subsequent analysis of the energy dependence of the dechanneling cross section enabled us to show the predominant induced lattice defects are likely of a 'point' nature. Electron microscopy investigations also support this assumption.
ISSN:	1042-0150 1029-4953
DOI:	10.1080/10420159508218801