Miniature Ferroelectret Microphone Design and Performance Evaluation Using Laser Excitation

Miniature microphones suitable for measurements of ultrasonic wave field scans in air are expensive, or lack sensitivity or do not cover the range beyond 100 kHz. Essential, that they are too large for such fields measurements. The use of ferroelectret (FE) film is proposed to construct a miniature,...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2022-12, Vol.69 (12), p.1-1
Hauptverfasser: Svilainis, Linas, Chaziachmetovas, Andrius, Eidukynas, Valdas, Alvarez-Arenas, Tomas Gomez, Dixon, Steve
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Sprache:eng
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