A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging

This paper reports on the first demonstration of a MEMS tunable hyperspectral Fabry-Perot filter based on a suspended tensile-strained single-layer dielectric two-dimensional subwavelength grating (2-D SWG) mirror. Rigorous coupled-wave analysis is used to design the 2-D SWG mirror, and the fabricat...

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Veröffentlicht in:	Journal of microelectromechanical systems 2023-02, Vol.32 (1), p.57-66
Hauptverfasser:	Mao, Haifeng, Dong, Xianshan, Liu, Yihui
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Bandwidth distributed Bragg reflector Fabry-Perot Fabry-Perot filter Fabry-Perot filters Gratings Hyperspectral imaging hyperspectral infrared imaging Infrared filters Infrared imaging MEMS Micromechanical devices Mirrors Optical filters Short wave radiation Silicon dioxide Spectral resolution subwavelength grating mirror Tunable filters Tuning Two dimensional analysis
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