Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material

Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material

Piezoelectric ZnO thin films have been successfully used for multi-layer surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. Piezoelectric magnesium zinc oxide (Mg/sub x/Zn/sub 1-x/O) films, which are formed by alloying ZnO and MgO, allow for flexibility in thin film SAW and BAW device...

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Hauptverfasser: Emanetoglu, N.W., Muthukumar, S., Wu, P., Wittstruck, R., Lu, Y.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Acoustic waves
Alloying
Bulk acoustic wave devices
Magnesium
Piezoelectric devices
Piezoelectric films
Surface acoustic wave devices
Surface acoustic waves
Thin film devices
Zinc oxide
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creator Emanetoglu, N.W.
Muthukumar, S.
Wu, P.
Wittstruck, R.
Lu, Y.
description Piezoelectric ZnO thin films have been successfully used for multi-layer surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. Piezoelectric magnesium zinc oxide (Mg/sub x/Zn/sub 1-x/O) films, which are formed by alloying ZnO and MgO, allow for flexibility in thin film SAW and BAW device design. The piezoelectric properties can be tailored by controlling the Mg content, as well as by using Mg/sub x/Zn/sub 1-x/O/ZnO multilayer structures. In this study, ZnO and Mg/sub x/Zn/sub 1-x/O (x/spl les/0.35) thin films are grown on R-plane sapphire substrates. Their SAW properties, including velocity dispersion and piezoelectric coupling, are characterized using test devices. Data for both Rayleigh and Love wave modes, propagating parallel and perpendicular to the c-axis, are presented. In piezoelectric Mg/sub x/Zn/sub 1-x/O films, the acoustic velocity increases, whereas the piezoelectric coupling decreases with increasing Mg content.
doi_str_mv 10.1109/ULTSYM.2001.991620
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In piezoelectric Mg/sub x/Zn/sub 1-x/O films, the acoustic velocity increases, whereas the piezoelectric coupling decreases with increasing Mg content.</description><subject>Acoustic waves</subject><subject>Alloying</subject><subject>Bulk acoustic wave devices</subject><subject>Magnesium</subject><subject>Piezoelectric devices</subject><subject>Piezoelectric films</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>Thin film devices</subject><subject>Zinc oxide</subject><isbn>0780371771</isbn><isbn>9780780371774</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2001</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpjYJAyNNAzNDSw1A_1CQmO9NUzMjAw1LO0NDQzMmBm4DIwtzAwNjc0NzfkYOAtLs4yAAJTA3MDS0tOBmPfdP3i0iSFCv2oPDDDULdC399KIVEhL7VcoSAztSo_NSc1uaQoM1khN7EktSgzMYeHgTUtMac4lRdKczNIubmGOHvoZqampsYXFGXmJhZVxkOsN8YrCQDynjKx</recordid><startdate>2001</startdate><enddate>2001</enddate><creator>Emanetoglu, N.W.</creator><creator>Muthukumar, S.</creator><creator>Wu, P.</creator><creator>Wittstruck, R.</creator><creator>Lu, Y.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2001</creationdate><title>Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material</title><author>Emanetoglu, N.W. ; Muthukumar, S. ; Wu, P. ; Wittstruck, R. ; Lu, Y.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_9916203</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2001</creationdate><topic>Acoustic waves</topic><topic>Alloying</topic><topic>Bulk acoustic wave devices</topic><topic>Magnesium</topic><topic>Piezoelectric devices</topic><topic>Piezoelectric films</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>Thin film devices</topic><topic>Zinc oxide</topic><toplevel>online_resources</toplevel><creatorcontrib>Emanetoglu, N.W.</creatorcontrib><creatorcontrib>Muthukumar, S.</creatorcontrib><creatorcontrib>Wu, P.</creatorcontrib><creatorcontrib>Wittstruck, R.</creatorcontrib><creatorcontrib>Lu, Y.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Emanetoglu, N.W.</au><au>Muthukumar, S.</au><au>Wu, P.</au><au>Wittstruck, R.</au><au>Lu, Y.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material</atitle><btitle>2001 IEEE Ultrasonics Symposium. 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subjects Acoustic waves
Alloying
Bulk acoustic wave devices
Magnesium
Piezoelectric devices
Piezoelectric films
Surface acoustic wave devices
Surface acoustic waves
Thin film devices
Zinc oxide
title Mg/sub x/Zn/sub 1-x/O: a new piezoelectric material
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