Standing-wave Fourier transform spectrometer based on integrated MEMS mirror and thin-film photodetector

Standing-wave Fourier transform spectrometer based on integrated MEMS mirror and thin-film photodetector

We report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 /spl mu/m, a thin-film photodetector, and...

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Veröffentlicht in:IEEE journal of selected topics in quantum electronics 2002-01, Vol.8 (1), p.98-105
Hauptverfasser: Kung, H.L., Bhalotra, S.R., Mansell, J.D., Miller, D.A.B., Harris, J.S.
Format: Artikel
Sprache:eng
Schlagworte:
Biomedical signal processing
Displacement
Fourier transform spectrometers
Fourier transforms
Interferometers
Micromechanical devices
Miniature
Mirrors
Photodetectors
Quantum electronics
Sampling
Sampling methods
Spectrometers
Spectroscopy
Stability
Thin films
Transistors
Wavelength measurement
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Beschreibung
Zusammenfassung:We report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 /spl mu/m, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm.
ISSN:1077-260X
1558-4542
DOI:10.1109/2944.991404