Theoretical study of electrostatic-field-induced bending of membrane in shunt-capacitance MEMS RF switches

The paper describes the simulation of the performance of MEMS RF switches by using ANSYS as a primary tool. It starts with mechanic field, then electrostatic field, and then couples the effect of the two fields. The Young's modulus is one of the major factors of the pull-down voltage, it analyz...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jia Ming, Guo Fangmin, Zhu Ziqiang, Lai Zongsheng, Chu Jianpeng, Wang Yuelin, Ge Yiaohong, Chen Siqing, Wang Weiyuan
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Capacitance Conductors Dielectrics Electrodes Electrostatics Micromechanical devices Radio frequency Switches Voltage
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