A compact serial RF MEMS switch for S-band application

A compact serial RF MEMS switch for S-band application

This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB i...

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Hauptverfasser: Hu Xiaodong, Lumiao, Hou Maohui, He Qingguo, Gao Cuizhuo, Bai Xiwei, Zhao Zhengping
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bridge circuits
Contacts
Dielectric losses
Insertion loss
Radio frequency
Radiofrequency microelectromechanical systems
Resistors
Resonance
Switches
Voltage
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Beschreibung
Zusammenfassung:This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.
DOI:10.1109/ICSICT.2001.981999