A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution
This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as wel...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2022-06, Vol.31 (3), p.402-407 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Wang, Yuan Song, Xiaoxiao Xi, Jingqian Li, Fangzheng Xu, Lei Liu, Huafeng Wang, Chen Kuang, Shuangyang Tu, Liang-Cheng Kraft, Michael Zhao, Chun |
| description | This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 \mu \text{V}/\surd Hz, and a resolution of 0.23 pN/ \surd Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018] |
| doi_str_mv | 10.1109/JMEMS.2022.3162015 |
| format | Article |
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The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 <inline-formula> <tex-math notation="LaTeX">\mu \text{V}/\surd </tex-math></inline-formula>Hz, and a resolution of 0.23 pN/<inline-formula> <tex-math notation="LaTeX">\surd </tex-math></inline-formula>Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018]]]></description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2022.3162015</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Actuation ; Amplitude modulation ; Blue-sideband actuation ; Cavity resonators ; double-ended tuning fork ; Frequency modulation ; Lorentz covariance ; Lorentz force ; Magnetic fields ; Magnetic hysteresis ; Magnetic resonance ; magnetometer ; Magnetometers ; Q-factor ; Sensitivity ; Sensitivity enhancement</subject><ispartof>Journal of microelectromechanical systems, 2022-06, Vol.31 (3), p.402-407</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2022</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c339t-3a7a00f55303a86b4e170188eb0b19892c5951828db5ffed81237d50c02aa61b3</citedby><cites>FETCH-LOGICAL-c339t-3a7a00f55303a86b4e170188eb0b19892c5951828db5ffed81237d50c02aa61b3</cites><orcidid>0000-0003-0757-2362 ; 0000-0001-8400-433X ; 0000-0003-3814-4520 ; 0000-0003-1014-9784 ; 0000-0002-7213-1072</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9745737$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/9745737$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Wang, Yuan</creatorcontrib><creatorcontrib>Song, Xiaoxiao</creatorcontrib><creatorcontrib>Xi, Jingqian</creatorcontrib><creatorcontrib>Li, Fangzheng</creatorcontrib><creatorcontrib>Xu, Lei</creatorcontrib><creatorcontrib>Liu, Huafeng</creatorcontrib><creatorcontrib>Wang, Chen</creatorcontrib><creatorcontrib>Kuang, Shuangyang</creatorcontrib><creatorcontrib>Tu, Liang-Cheng</creatorcontrib><creatorcontrib>Kraft, Michael</creatorcontrib><creatorcontrib>Zhao, Chun</creatorcontrib><title>A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description><![CDATA[This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 <inline-formula> <tex-math notation="LaTeX">\mu \text{V}/\surd </tex-math></inline-formula>Hz, and a resolution of 0.23 pN/<inline-formula> <tex-math notation="LaTeX">\surd </tex-math></inline-formula>Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. [2022-0018]]]></description><subject>Actuation</subject><subject>Amplitude modulation</subject><subject>Blue-sideband actuation</subject><subject>Cavity resonators</subject><subject>double-ended tuning fork</subject><subject>Frequency modulation</subject><subject>Lorentz covariance</subject><subject>Lorentz force</subject><subject>Magnetic fields</subject><subject>Magnetic hysteresis</subject><subject>Magnetic resonance</subject><subject>magnetometer</subject><subject>Magnetometers</subject><subject>Q-factor</subject><subject>Sensitivity</subject><subject>Sensitivity enhancement</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kMtOwzAQRSMEEqXwA7CxxDrFY8exsyxVykOtkCisIyeZlFSpXRwHUb6ehFas5i7OmSvdILgGOgGgyd3zMl2uJowyNuEQMwriJBhBEkHYR3XaZypkKEHI8-CibTeUQhSpeBSYKXnF1hptPFlYh8b_hHPrCiRLvTbo7RY9OpJ-7xpb-9qsyX3TIVnVJebalGRa-E772hriLUnNhza9ukLT9vBX7fdkgIaGphuoy-Cs0k2LV8c7Dt7n6dvsMVy8PDzNpouw4DzxIddSU1oJwSnXKs4jBElBKcxpDolKWCESAYqpMhdVhaUCxmUpaEGZ1jHkfBzcHv7unP3ssPXZxnbO9JUZiyWjSoGIeoodqMLZtnVYZTtXb7XbZ0CzYdfsb9ds2DU77tpLNwepRsR_IZGRkFzyXwhVdKc</recordid><startdate>20220601</startdate><enddate>20220601</enddate><creator>Wang, Yuan</creator><creator>Song, Xiaoxiao</creator><creator>Xi, Jingqian</creator><creator>Li, Fangzheng</creator><creator>Xu, Lei</creator><creator>Liu, Huafeng</creator><creator>Wang, Chen</creator><creator>Kuang, Shuangyang</creator><creator>Tu, Liang-Cheng</creator><creator>Kraft, Michael</creator><creator>Zhao, Chun</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-0757-2362</orcidid><orcidid>https://orcid.org/0000-0001-8400-433X</orcidid><orcidid>https://orcid.org/0000-0003-3814-4520</orcidid><orcidid>https://orcid.org/0000-0003-1014-9784</orcidid><orcidid>https://orcid.org/0000-0002-7213-1072</orcidid></search><sort><creationdate>20220601</creationdate><title>A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution</title><author>Wang, Yuan ; Song, Xiaoxiao ; Xi, Jingqian ; Li, Fangzheng ; Xu, Lei ; Liu, Huafeng ; Wang, Chen ; Kuang, Shuangyang ; Tu, Liang-Cheng ; Kraft, Michael ; Zhao, Chun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c339t-3a7a00f55303a86b4e170188eb0b19892c5951828db5ffed81237d50c02aa61b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Actuation</topic><topic>Amplitude modulation</topic><topic>Blue-sideband actuation</topic><topic>Cavity resonators</topic><topic>double-ended tuning fork</topic><topic>Frequency modulation</topic><topic>Lorentz covariance</topic><topic>Lorentz force</topic><topic>Magnetic fields</topic><topic>Magnetic hysteresis</topic><topic>Magnetic resonance</topic><topic>magnetometer</topic><topic>Magnetometers</topic><topic>Q-factor</topic><topic>Sensitivity</topic><topic>Sensitivity enhancement</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wang, Yuan</creatorcontrib><creatorcontrib>Song, Xiaoxiao</creatorcontrib><creatorcontrib>Xi, Jingqian</creatorcontrib><creatorcontrib>Li, Fangzheng</creatorcontrib><creatorcontrib>Xu, Lei</creatorcontrib><creatorcontrib>Liu, Huafeng</creatorcontrib><creatorcontrib>Wang, Chen</creatorcontrib><creatorcontrib>Kuang, Shuangyang</creatorcontrib><creatorcontrib>Tu, Liang-Cheng</creatorcontrib><creatorcontrib>Kraft, Michael</creatorcontrib><creatorcontrib>Zhao, Chun</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wang, Yuan</au><au>Song, Xiaoxiao</au><au>Xi, Jingqian</au><au>Li, Fangzheng</au><au>Xu, Lei</au><au>Liu, Huafeng</au><au>Wang, Chen</au><au>Kuang, Shuangyang</au><au>Tu, Liang-Cheng</au><au>Kraft, Michael</au><au>Zhao, Chun</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2022-06-01</date><risdate>2022</risdate><volume>31</volume><issue>3</issue><spage>402</spage><epage>407</epage><pages>402-407</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract><![CDATA[This paper reports a miniaturized resonant Lorentz-force magnetometer that exploits blue-sideband actuation to attain a better sensitivity and resolution. The resonant magnetometer consists of a double-ended tuning fork (DETF) resonator with cavity slots to optimize thermoelastic dissipation, as well as a Lorentz-force generator structure to transduce the magnetic force to the axial of the resonator. The proposed device demonstrates a Lorentz-force sensitivity of 5.5 mV/nN, a noise floor of 1.25 <inline-formula> <tex-math notation="LaTeX">\mu \text{V}/\surd </tex-math></inline-formula>Hz, and a resolution of 0.23 pN/<inline-formula> <tex-math notation="LaTeX">\surd </tex-math></inline-formula>Hz. In comparison with a conventional drive scheme, the blue-sideband actuation achieves approximately two orders of magnitude improvement regarding sensitivity and resolution than that of the amplitude modulation (AM) readout and 3.6-fold enhancement than that of the frequency modulation (FM) readout. The results affirm the merit of the novel excitation method and provide solid evidence of its effectiveness in practical applications. 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| subjects | Actuation Amplitude modulation Blue-sideband actuation Cavity resonators double-ended tuning fork Frequency modulation Lorentz covariance Lorentz force Magnetic fields Magnetic hysteresis Magnetic resonance magnetometer Magnetometers Q-factor Sensitivity Sensitivity enhancement |
| title | A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution |
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