Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN

We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption effic...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2022-06, Vol.32 (4), p.1-4
Hauptverfasser:	Nishikawa, M., Sawai, K., Sakai, K., Kirigane, N., Ohnishi, K., Nakano, W., Matsuo, Y., Shibata, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption Ellipsometry Magnetron sputtering molybdenum nitride Nanowires Optical device fabrication Optical variables control Photonics Photons Silicon SNSPD SSPD Substrates Superconducting photodetectors Superconductivity Superconductors Time domain analysis Timing jitter Vibration
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