Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN
We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption effic...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on applied superconductivity 2022-06, Vol.32 (4), p.1-4 |
|---|---|
| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 4 |
|---|---|
| container_issue | 4 |
| container_start_page | 1 |
| container_title | IEEE transactions on applied superconductivity |
| container_volume | 32 |
| creator | Nishikawa, M. Sawai, K. Sakai, K. Kirigane, N. Ohnishi, K. Nakano, W. Matsuo, Y. Shibata, H. |
| description | We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD. |
| doi_str_mv | 10.1109/TASC.2022.3144967 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_9693286</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>9693286</ieee_id><sourcerecordid>2626973042</sourcerecordid><originalsourceid>FETCH-LOGICAL-c359t-f1cdd95377c13e97150ee221752fbd4578e3f2028a28f1d80608b38a26bdebc53</originalsourceid><addsrcrecordid>eNo9kFFLwzAQx4MoOKcfQHwp-NyZS5o2eRzT6WBOYdtzaNOrdsxmJinitzdlw6e7g9__jvsRcgt0AkDVw2a6nk0YZWzCIctUXpyREQghUyZAnMeeCkglY_ySXHm_oxQymYkRWczLyrWmDK3tEtsk6_6Aztiu7k1ou49kVXb2p3WYrOO0x_T904ZIPmJAE6zzydYP2KtdXZOLptx7vDnVMdnOnzazl3T59ryYTZep4UKFtAFT10rwojDAURUgKCJjUAjWVHUmCom8iY_IkskGaklzKisep7yqsTKCj8n9ce_B2e8efdA727suntQsZ7kqOM1YpOBIGWe9d9jog2u_SvergerBmB6M6cGYPhmLmbtjpkXEf17lijOZ8z-tZ2az</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2626973042</pqid></control><display><type>article</type><title>Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN</title><source>IEEE Electronic Library (IEL)</source><creator>Nishikawa, M. ; Sawai, K. ; Sakai, K. ; Kirigane, N. ; Ohnishi, K. ; Nakano, W. ; Matsuo, Y. ; Shibata, H.</creator><creatorcontrib>Nishikawa, M. ; Sawai, K. ; Sakai, K. ; Kirigane, N. ; Ohnishi, K. ; Nakano, W. ; Matsuo, Y. ; Shibata, H.</creatorcontrib><description>We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD.</description><identifier>ISSN: 1051-8223</identifier><identifier>EISSN: 1558-2515</identifier><identifier>DOI: 10.1109/TASC.2022.3144967</identifier><identifier>CODEN: ITASE9</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Absorption ; Ellipsometry ; Magnetron sputtering ; molybdenum nitride ; Nanowires ; Optical device fabrication ; Optical variables control ; Photonics ; Photons ; Silicon ; SNSPD ; SSPD ; Substrates ; Superconducting photodetectors ; Superconductivity ; Superconductors ; Time domain analysis ; Timing jitter ; Vibration</subject><ispartof>IEEE transactions on applied superconductivity, 2022-06, Vol.32 (4), p.1-4</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2022</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c359t-f1cdd95377c13e97150ee221752fbd4578e3f2028a28f1d80608b38a26bdebc53</citedby><cites>FETCH-LOGICAL-c359t-f1cdd95377c13e97150ee221752fbd4578e3f2028a28f1d80608b38a26bdebc53</cites><orcidid>0000-0003-2831-5963 ; 0000-0002-6712-402X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9693286$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/9693286$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Nishikawa, M.</creatorcontrib><creatorcontrib>Sawai, K.</creatorcontrib><creatorcontrib>Sakai, K.</creatorcontrib><creatorcontrib>Kirigane, N.</creatorcontrib><creatorcontrib>Ohnishi, K.</creatorcontrib><creatorcontrib>Nakano, W.</creatorcontrib><creatorcontrib>Matsuo, Y.</creatorcontrib><creatorcontrib>Shibata, H.</creatorcontrib><title>Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN</title><title>IEEE transactions on applied superconductivity</title><addtitle>TASC</addtitle><description>We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD.</description><subject>Absorption</subject><subject>Ellipsometry</subject><subject>Magnetron sputtering</subject><subject>molybdenum nitride</subject><subject>Nanowires</subject><subject>Optical device fabrication</subject><subject>Optical variables control</subject><subject>Photonics</subject><subject>Photons</subject><subject>Silicon</subject><subject>SNSPD</subject><subject>SSPD</subject><subject>Substrates</subject><subject>Superconducting photodetectors</subject><subject>Superconductivity</subject><subject>Superconductors</subject><subject>Time domain analysis</subject><subject>Timing jitter</subject><subject>Vibration</subject><issn>1051-8223</issn><issn>1558-2515</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kFFLwzAQx4MoOKcfQHwp-NyZS5o2eRzT6WBOYdtzaNOrdsxmJinitzdlw6e7g9__jvsRcgt0AkDVw2a6nk0YZWzCIctUXpyREQghUyZAnMeeCkglY_ySXHm_oxQymYkRWczLyrWmDK3tEtsk6_6Aztiu7k1ou49kVXb2p3WYrOO0x_T904ZIPmJAE6zzydYP2KtdXZOLptx7vDnVMdnOnzazl3T59ryYTZep4UKFtAFT10rwojDAURUgKCJjUAjWVHUmCom8iY_IkskGaklzKisep7yqsTKCj8n9ce_B2e8efdA727suntQsZ7kqOM1YpOBIGWe9d9jog2u_SvergerBmB6M6cGYPhmLmbtjpkXEf17lijOZ8z-tZ2az</recordid><startdate>20220601</startdate><enddate>20220601</enddate><creator>Nishikawa, M.</creator><creator>Sawai, K.</creator><creator>Sakai, K.</creator><creator>Kirigane, N.</creator><creator>Ohnishi, K.</creator><creator>Nakano, W.</creator><creator>Matsuo, Y.</creator><creator>Shibata, H.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-2831-5963</orcidid><orcidid>https://orcid.org/0000-0002-6712-402X</orcidid></search><sort><creationdate>20220601</creationdate><title>Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN</title><author>Nishikawa, M. ; Sawai, K. ; Sakai, K. ; Kirigane, N. ; Ohnishi, K. ; Nakano, W. ; Matsuo, Y. ; Shibata, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c359t-f1cdd95377c13e97150ee221752fbd4578e3f2028a28f1d80608b38a26bdebc53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Absorption</topic><topic>Ellipsometry</topic><topic>Magnetron sputtering</topic><topic>molybdenum nitride</topic><topic>Nanowires</topic><topic>Optical device fabrication</topic><topic>Optical variables control</topic><topic>Photonics</topic><topic>Photons</topic><topic>Silicon</topic><topic>SNSPD</topic><topic>SSPD</topic><topic>Substrates</topic><topic>Superconducting photodetectors</topic><topic>Superconductivity</topic><topic>Superconductors</topic><topic>Time domain analysis</topic><topic>Timing jitter</topic><topic>Vibration</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nishikawa, M.</creatorcontrib><creatorcontrib>Sawai, K.</creatorcontrib><creatorcontrib>Sakai, K.</creatorcontrib><creatorcontrib>Kirigane, N.</creatorcontrib><creatorcontrib>Ohnishi, K.</creatorcontrib><creatorcontrib>Nakano, W.</creatorcontrib><creatorcontrib>Matsuo, Y.</creatorcontrib><creatorcontrib>Shibata, H.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on applied superconductivity</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Nishikawa, M.</au><au>Sawai, K.</au><au>Sakai, K.</au><au>Kirigane, N.</au><au>Ohnishi, K.</au><au>Nakano, W.</au><au>Matsuo, Y.</au><au>Shibata, H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN</atitle><jtitle>IEEE transactions on applied superconductivity</jtitle><stitle>TASC</stitle><date>2022-06-01</date><risdate>2022</risdate><volume>32</volume><issue>4</issue><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>1051-8223</issn><eissn>1558-2515</eissn><coden>ITASE9</coden><abstract>We report the fabrication of superconducting nanowire single-photon detector (SNSPD, SSPD) based on molybdenum nitride (MoN) film with and without a cavity structure. Ultrathin polycrystalline γ-Mo 2 N films with a T c about 6 K were obtained by reactive DC magnetron sputtering. The absorption efficiency of the device was calculated by the finite-difference time-domain (FDTD) method using the optical constants of MoN determined by ellipsometry measurements. The SNSPD with a meander of 150-nm-width and 7-nm-thick nanowire showed a long saturation plateau in the bias current dependence of the system detection efficiency (SDE) at visible wavelength. The SNSPD with a cavity structure showed an SDE of 37% and a timing jitter of 79 ps at a wavelength of 1560 nm. The results show that MoN is a promising alternative to amorphous superconductors for high-performance SNSPD.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TASC.2022.3144967</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0003-2831-5963</orcidid><orcidid>https://orcid.org/0000-0002-6712-402X</orcidid></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1051-8223 |
| ispartof | IEEE transactions on applied superconductivity, 2022-06, Vol.32 (4), p.1-4 |
| issn | 1051-8223 1558-2515 |
| language | eng |
| recordid | cdi_ieee_primary_9693286 |
| source | IEEE Electronic Library (IEL) |
| subjects | Absorption Ellipsometry Magnetron sputtering molybdenum nitride Nanowires Optical device fabrication Optical variables control Photonics Photons Silicon SNSPD SSPD Substrates Superconducting photodetectors Superconductivity Superconductors Time domain analysis Timing jitter Vibration |
| title | Fabrication of Superconducting Nanowire Single-Photon Detectors Using MoN |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-19T00%3A20%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Fabrication%20of%20Superconducting%20Nanowire%20Single-Photon%20Detectors%20Using%20MoN&rft.jtitle=IEEE%20transactions%20on%20applied%20superconductivity&rft.au=Nishikawa,%20M.&rft.date=2022-06-01&rft.volume=32&rft.issue=4&rft.spage=1&rft.epage=4&rft.pages=1-4&rft.issn=1051-8223&rft.eissn=1558-2515&rft.coden=ITASE9&rft_id=info:doi/10.1109/TASC.2022.3144967&rft_dat=%3Cproquest_RIE%3E2626973042%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2626973042&rft_id=info:pmid/&rft_ieee_id=9693286&rfr_iscdi=true |