A CMOS photodiode model

This paper utilizes the concepts of equilibrium equations and minority carrier continuity to build and derive a CMOS photodiode model. By using the TSMC 1P3M 0.5 /spl mu/m CMOS technology, photodiodes with two different types of N/sub well/-P/sub Epitaxial/-P/sub substrate/ and N/sub diffusion/-P/su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wei-Jean Liu, Chen, O.T.-C., Li-Kuo Dai, Ping-Kuo Weng, Kaung-Hsin Huang, Far- Wen Jih
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CMOS technology Equations Manufacturing processes Photodiodes Semiconductor device modeling Semiconductor process modeling Substrates Surface waves Testing Virtual manufacturing
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