Thermally-Compensated Optical Fiber Silicon Sensor Platform
This paper describes the characterization and testing of a temperature-compensated optical fiber platform for silicon sensors. Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in si...
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| Veröffentlicht in: | IEEE sensors journal 2021-11, Vol.21 (21), p.24121-24128 |
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| container_end_page | 24128 |
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| container_title | IEEE sensors journal |
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| creator | Lorenzo, Simon Kroo, Anne Wong, Yu-Po Solgaard, Olav |
| description | This paper describes the characterization and testing of a temperature-compensated optical fiber platform for silicon sensors. Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in silicon sensors are significant for operational temperatures from 275-315 K but can be compensated using a collocated nano-fabricated temperature sensor. Our silicon temperature sensor is a 150~\mu \text{m} wide and 5~\mu \text{m} thick disk that is fabricated on the wafer-scale with a 3 mK/ \sqrt {Hz} resolution and a 1.7 s thermal time constant in air. Our temperature-compensated platform has sufficient sensitivity and bandwidth to reduce thermal signals in silicon pressure sensors and microphones by more than an order of magnitude. |
| doi_str_mv | 10.1109/JSEN.2021.3112066 |
| format | Article |
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Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in silicon sensors are significant for operational temperatures from 275-315 K but can be compensated using a collocated nano-fabricated temperature sensor. Our silicon temperature sensor is a <inline-formula> <tex-math notation="LaTeX">150~\mu \text{m} </tex-math></inline-formula> wide and <inline-formula> <tex-math notation="LaTeX">5~\mu \text{m} </tex-math></inline-formula> thick disk that is fabricated on the wafer-scale with a 3 mK/<inline-formula> <tex-math notation="LaTeX">\sqrt {Hz} </tex-math></inline-formula> resolution and a 1.7 s thermal time constant in air. Our temperature-compensated platform has sufficient sensitivity and bandwidth to reduce thermal signals in silicon pressure sensors and microphones by more than an order of magnitude.]]></description><identifier>ISSN: 1530-437X</identifier><identifier>EISSN: 1558-1748</identifier><identifier>DOI: 10.1109/JSEN.2021.3112066</identifier><identifier>CODEN: ISJEAZ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acoustic sensors ; Microphones ; microsensors ; Optical device fabrication ; Optical fiber sensors ; Optical fibers ; optical sensors ; Pressure sensors ; sensor systems ; Sensors ; Silicon ; Temperature ; Temperature effects ; Temperature sensors ; thermal sensors ; Time constant ; Wave reflection ; Wavelength division multiplexing</subject><ispartof>IEEE sensors journal, 2021-11, Vol.21 (21), p.24121-24128</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c336t-5339afb5bcf0d0e9e06b0ec60d3c3b753f1030051f0512c06837c22453ebe47d3</citedby><cites>FETCH-LOGICAL-c336t-5339afb5bcf0d0e9e06b0ec60d3c3b753f1030051f0512c06837c22453ebe47d3</cites><orcidid>0000-0001-6110-7758 ; 0000-0002-4267-819X ; 0000-0003-4372-2786 ; 0000-0002-0499-2065</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9535495$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/9535495$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Lorenzo, Simon</creatorcontrib><creatorcontrib>Kroo, Anne</creatorcontrib><creatorcontrib>Wong, Yu-Po</creatorcontrib><creatorcontrib>Solgaard, Olav</creatorcontrib><title>Thermally-Compensated Optical Fiber Silicon Sensor Platform</title><title>IEEE sensors journal</title><addtitle>JSEN</addtitle><description><![CDATA[This paper describes the characterization and testing of a temperature-compensated optical fiber platform for silicon sensors. Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in silicon sensors are significant for operational temperatures from 275-315 K but can be compensated using a collocated nano-fabricated temperature sensor. Our silicon temperature sensor is a <inline-formula> <tex-math notation="LaTeX">150~\mu \text{m} </tex-math></inline-formula> wide and <inline-formula> <tex-math notation="LaTeX">5~\mu \text{m} </tex-math></inline-formula> thick disk that is fabricated on the wafer-scale with a 3 mK/<inline-formula> <tex-math notation="LaTeX">\sqrt {Hz} </tex-math></inline-formula> resolution and a 1.7 s thermal time constant in air. Our temperature-compensated platform has sufficient sensitivity and bandwidth to reduce thermal signals in silicon pressure sensors and microphones by more than an order of magnitude.]]></description><subject>Acoustic sensors</subject><subject>Microphones</subject><subject>microsensors</subject><subject>Optical device fabrication</subject><subject>Optical fiber sensors</subject><subject>Optical fibers</subject><subject>optical sensors</subject><subject>Pressure sensors</subject><subject>sensor systems</subject><subject>Sensors</subject><subject>Silicon</subject><subject>Temperature</subject><subject>Temperature effects</subject><subject>Temperature sensors</subject><subject>thermal sensors</subject><subject>Time constant</subject><subject>Wave reflection</subject><subject>Wavelength division multiplexing</subject><issn>1530-437X</issn><issn>1558-1748</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1Lw0AQhhdRsFZ_gHgJeE6d3clmEzxJsX5QrNAK3pbNZhZTkm7cpIf-exNaPMwHzPu-Aw9jtxxmnEP-8L5-_pgJEHyGnAtI0zM24VJmMVdJdj7uCHGC6vuSXXXdFoDnSqoJe9z8UGhMXR_iuW9a2nWmpzJatX1lTR0tqoJCtK7qyvpdtB7OPkSftemdD801u3Cm7ujmNKfsa_G8mb_Gy9XL2_xpGVvEtI8lYm5cIQvroATKCdICyKZQosVCSXQcEEByN5SwkGaorBCJRCooUSVO2f0xtw3-d09dr7d-H3bDSy1kloECnqpBxY8qG3zXBXK6DVVjwkFz0CMjPTLSIyN9YjR47o6eioj-9blEmQztDzzJYXY</recordid><startdate>20211101</startdate><enddate>20211101</enddate><creator>Lorenzo, Simon</creator><creator>Kroo, Anne</creator><creator>Wong, Yu-Po</creator><creator>Solgaard, Olav</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0001-6110-7758</orcidid><orcidid>https://orcid.org/0000-0002-4267-819X</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid><orcidid>https://orcid.org/0000-0002-0499-2065</orcidid></search><sort><creationdate>20211101</creationdate><title>Thermally-Compensated Optical Fiber Silicon Sensor Platform</title><author>Lorenzo, Simon ; Kroo, Anne ; Wong, Yu-Po ; Solgaard, Olav</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c336t-5339afb5bcf0d0e9e06b0ec60d3c3b753f1030051f0512c06837c22453ebe47d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Acoustic sensors</topic><topic>Microphones</topic><topic>microsensors</topic><topic>Optical device fabrication</topic><topic>Optical fiber sensors</topic><topic>Optical fibers</topic><topic>optical sensors</topic><topic>Pressure sensors</topic><topic>sensor systems</topic><topic>Sensors</topic><topic>Silicon</topic><topic>Temperature</topic><topic>Temperature effects</topic><topic>Temperature sensors</topic><topic>thermal sensors</topic><topic>Time constant</topic><topic>Wave reflection</topic><topic>Wavelength division multiplexing</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lorenzo, Simon</creatorcontrib><creatorcontrib>Kroo, Anne</creatorcontrib><creatorcontrib>Wong, Yu-Po</creatorcontrib><creatorcontrib>Solgaard, Olav</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE sensors journal</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lorenzo, Simon</au><au>Kroo, Anne</au><au>Wong, Yu-Po</au><au>Solgaard, Olav</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Thermally-Compensated Optical Fiber Silicon Sensor Platform</atitle><jtitle>IEEE sensors journal</jtitle><stitle>JSEN</stitle><date>2021-11-01</date><risdate>2021</risdate><volume>21</volume><issue>21</issue><spage>24121</spage><epage>24128</epage><pages>24121-24128</pages><issn>1530-437X</issn><eissn>1558-1748</eissn><coden>ISJEAZ</coden><abstract><![CDATA[This paper describes the characterization and testing of a temperature-compensated optical fiber platform for silicon sensors. Our sensor platform consists of standard optical fiber hardware for optically-balanced and wavelength-multiplexed reflection measurements. We show that thermal effects in silicon sensors are significant for operational temperatures from 275-315 K but can be compensated using a collocated nano-fabricated temperature sensor. Our silicon temperature sensor is a <inline-formula> <tex-math notation="LaTeX">150~\mu \text{m} </tex-math></inline-formula> wide and <inline-formula> <tex-math notation="LaTeX">5~\mu \text{m} </tex-math></inline-formula> thick disk that is fabricated on the wafer-scale with a 3 mK/<inline-formula> <tex-math notation="LaTeX">\sqrt {Hz} </tex-math></inline-formula> resolution and a 1.7 s thermal time constant in air. Our temperature-compensated platform has sufficient sensitivity and bandwidth to reduce thermal signals in silicon pressure sensors and microphones by more than an order of magnitude.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSEN.2021.3112066</doi><tpages>8</tpages><orcidid>https://orcid.org/0000-0001-6110-7758</orcidid><orcidid>https://orcid.org/0000-0002-4267-819X</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid><orcidid>https://orcid.org/0000-0002-0499-2065</orcidid><oa>free_for_read</oa></addata></record> |
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| source | IEEE Electronic Library (IEL) |
| subjects | Acoustic sensors Microphones microsensors Optical device fabrication Optical fiber sensors Optical fibers optical sensors Pressure sensors sensor systems Sensors Silicon Temperature Temperature effects Temperature sensors thermal sensors Time constant Wave reflection Wavelength division multiplexing |
| title | Thermally-Compensated Optical Fiber Silicon Sensor Platform |
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