Physical properties of (Ba,Sr)TiO/sub 3/ thin films used for integrated capacitors in microwave applications

Recently, there has been significant interest in use of (Ba, Sr)TiO/sub 3/ (BST) thin films for tunable high frequency (RF and microwave) components. In this paper we discuss the electrical properties of BST thin films gown by metalorganic chemical vapor deposition (MOCVD) as a function of DC bias a...

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Bibliographische Detailangaben

Hauptverfasser:	Ayguavives, T., Tombak, A., Maria, J.-P., Stauf, G.T., Ragaglia, C., Roeder, J., Mortazawi, A., Kingon, A.I.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Binary search trees Chemical vapor deposition Dielectric losses Displays Microwave devices MOCVD Radio frequency Sputtering Titanium Transistors
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