Excimer laser annealed, poly-Si thin film transistors for flat panel imager application

Excimer laser annealed, poly-Si thin film transistors for flat panel imager application

Pulsed Excimer-Laser Annealed (ELA) poly-Si Thin Film Transistor (TFT) technology has become an important technology for large area electronic applications. In this talk, we will report the progress and current status of our effort in building advanced flat panel imagers based on poly-Si TFT technol...

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Bibliographische Detailangaben
Hauptverfasser: Lu, J.P., Van Schuylenbergh, K., Ho, J., Wang, Y., Nylen, P., Boyce, J.B., Street, R.A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Active matrix technology
Annealing
Driver circuits
Flat panel displays
Histograms
Leakage current
Pixel
Prototypes
Switches
Thin film transistors
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Beschreibung
Zusammenfassung:Pulsed Excimer-Laser Annealed (ELA) poly-Si Thin Film Transistor (TFT) technology has become an important technology for large area electronic applications. In this talk, we will report the progress and current status of our effort in building advanced flat panel imagers based on poly-Si TFT technology.
DOI:10.1109/DRC.2001.937927