Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method
Microfluidic chips with the function of hydrodynamic focusing is widely used in the field of cell electroporation, droplet formation, drug screening and particle enrichment. Due to the small channel size of microfluidic chip, the existing processing methods have the defects of high fabrication cost...
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| Veröffentlicht in: | IEEE access 2021, Vol.9, p.11533-11542 |
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| creator | Xie, Jiaqing Meng, Xiaoyu Pang, Haoran Yu, Qian Zhou, Zhikang Wang, Fangchao |
| description | Microfluidic chips with the function of hydrodynamic focusing is widely used in the field of cell electroporation, droplet formation, drug screening and particle enrichment. Due to the small channel size of microfluidic chip, the existing processing methods have the defects of high fabrication cost or low dimensional consistency, the drawback is particularly prominent at small fabrication quantity. In this study, hydrodynamic focusing microfluidic chip was successfully fabricated by Liquid Crystal Display (LCD) mask photo-curing method with high efficiency and precision, the mechanism of curing parameters on the accuracy of microstructure was investigated, the hot pressing process was proposed to realize the bonding of cured photosensitive resin and glass substrate. By analyzing the focusing width of typical cross structure channel, a hydrodynamic focusing chip was designed. The effects of exposure time and single layer thickness on whole curing time was studied, the factors affecting the surface roughness were investigated, and the dimensional accuracy control method was proposed. The effect of bonding pressure on cured resin temperature was calculated and tested. The focusing width was verified by theoretical calculation and experiment. The mechanism for the inconsistency between the experimental focusing width and the theoretical focusing width was analyzed. The research proposed a solution of microfluidic design, fabrication, bonding and testing, which could provide a theoretical and methodological support for the efficient fabrication of microfluidic chips. |
| doi_str_mv | 10.1109/ACCESS.2021.3051200 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_ieee_</sourceid><recordid>TN_cdi_ieee_primary_9320491</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>9320491</ieee_id><doaj_id>oai_doaj_org_article_bfde961aa0fa479b8054cd41dbb2518b</doaj_id><sourcerecordid>2479888437</sourcerecordid><originalsourceid>FETCH-LOGICAL-c408t-dde3cba85bb188a2bbe014a7da71425d8f4c328b50c31effb7dfbf6c044cd7bb3</originalsourceid><addsrcrecordid>eNpNkc1O3DAUhaOqlYooT8DGUtcz9V8mzhKlTEEaBNLQtXX9x3ga4mA7i7wCT10PQQhv7Ht8z2frnqq6JHhNCG5_XXXd9X6_ppiSNcM1oRh_qc4o2bQrVrPN10_n79VFSkdclihS3ZxVr_s8mRmFAeWDRQ_RjhAh-1LDYNCjTRkFh25mE4OZB3j2Gm2DnpIfntCd1zG4fvKmqN3Bj2gLKnoN2RqkZrTzL-UOdXFOGXr026exhxndQfqHHg4hh1U3xTeQzYdgflTfHPTJXrzv59Xf7fVjd7Pa3f-57a52K82xyCtjLNMKRK0UEQKoUhYTDo2BhnBaG-G4ZlSoGmtGrHOqMU65jcaca9Moxc6r24VrAhzlGP0zxFkG8PJNCPFJQsxe91YqZ2y7IQDYAW9aJXBdIJwYpWhNxIn1c2GNMbxMZVryGKY4lO9LWgxCCM6a0sWWrjKvlKJ1H68SLE8ZyiVDecpQvmdYXJeLy1trPxwto5i3hP0H5NiazQ</addsrcrecordid><sourcetype>Open Website</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2479888437</pqid></control><display><type>article</type><title>Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method</title><source>IEEE Open Access Journals</source><source>DOAJ Directory of Open Access Journals</source><source>EZB-FREE-00999 freely available EZB journals</source><creator>Xie, Jiaqing ; Meng, Xiaoyu ; Pang, Haoran ; Yu, Qian ; Zhou, Zhikang ; Wang, Fangchao</creator><creatorcontrib>Xie, Jiaqing ; Meng, Xiaoyu ; Pang, Haoran ; Yu, Qian ; Zhou, Zhikang ; Wang, Fangchao</creatorcontrib><description>Microfluidic chips with the function of hydrodynamic focusing is widely used in the field of cell electroporation, droplet formation, drug screening and particle enrichment. Due to the small channel size of microfluidic chip, the existing processing methods have the defects of high fabrication cost or low dimensional consistency, the drawback is particularly prominent at small fabrication quantity. In this study, hydrodynamic focusing microfluidic chip was successfully fabricated by Liquid Crystal Display (LCD) mask photo-curing method with high efficiency and precision, the mechanism of curing parameters on the accuracy of microstructure was investigated, the hot pressing process was proposed to realize the bonding of cured photosensitive resin and glass substrate. By analyzing the focusing width of typical cross structure channel, a hydrodynamic focusing chip was designed. The effects of exposure time and single layer thickness on whole curing time was studied, the factors affecting the surface roughness were investigated, and the dimensional accuracy control method was proposed. The effect of bonding pressure on cured resin temperature was calculated and tested. The focusing width was verified by theoretical calculation and experiment. The mechanism for the inconsistency between the experimental focusing width and the theoretical focusing width was analyzed. The research proposed a solution of microfluidic design, fabrication, bonding and testing, which could provide a theoretical and methodological support for the efficient fabrication of microfluidic chips.</description><identifier>ISSN: 2169-3536</identifier><identifier>EISSN: 2169-3536</identifier><identifier>DOI: 10.1109/ACCESS.2021.3051200</identifier><identifier>CODEN: IAECCG</identifier><language>eng</language><publisher>Piscataway: IEEE</publisher><subject>Bonding ; Chip formation ; Control methods ; Crystal defects ; Electroporation ; exposure time ; Fabrication ; Focusing ; Glass substrates ; Heating systems ; Hot pressing ; Hydrodynamic focusing ; Hydrodynamics ; LCD mask photo-curing ; LCDs ; Liquid crystal displays ; Mathematical analysis ; microfluidic chip ; Microfluidics ; Photocuring ; Photosensitivity ; Pressure effects ; Resins ; Surface roughness ; Thickness</subject><ispartof>IEEE access, 2021, Vol.9, p.11533-11542</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c408t-dde3cba85bb188a2bbe014a7da71425d8f4c328b50c31effb7dfbf6c044cd7bb3</citedby><cites>FETCH-LOGICAL-c408t-dde3cba85bb188a2bbe014a7da71425d8f4c328b50c31effb7dfbf6c044cd7bb3</cites><orcidid>0000-0002-0025-4356</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9320491$$EHTML$$P50$$Gieee$$Hfree_for_read</linktohtml><link.rule.ids>314,777,781,861,2096,4010,27614,27904,27905,27906,54914</link.rule.ids></links><search><creatorcontrib>Xie, Jiaqing</creatorcontrib><creatorcontrib>Meng, Xiaoyu</creatorcontrib><creatorcontrib>Pang, Haoran</creatorcontrib><creatorcontrib>Yu, Qian</creatorcontrib><creatorcontrib>Zhou, Zhikang</creatorcontrib><creatorcontrib>Wang, Fangchao</creatorcontrib><title>Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method</title><title>IEEE access</title><addtitle>Access</addtitle><description>Microfluidic chips with the function of hydrodynamic focusing is widely used in the field of cell electroporation, droplet formation, drug screening and particle enrichment. Due to the small channel size of microfluidic chip, the existing processing methods have the defects of high fabrication cost or low dimensional consistency, the drawback is particularly prominent at small fabrication quantity. In this study, hydrodynamic focusing microfluidic chip was successfully fabricated by Liquid Crystal Display (LCD) mask photo-curing method with high efficiency and precision, the mechanism of curing parameters on the accuracy of microstructure was investigated, the hot pressing process was proposed to realize the bonding of cured photosensitive resin and glass substrate. By analyzing the focusing width of typical cross structure channel, a hydrodynamic focusing chip was designed. The effects of exposure time and single layer thickness on whole curing time was studied, the factors affecting the surface roughness were investigated, and the dimensional accuracy control method was proposed. The effect of bonding pressure on cured resin temperature was calculated and tested. The focusing width was verified by theoretical calculation and experiment. The mechanism for the inconsistency between the experimental focusing width and the theoretical focusing width was analyzed. The research proposed a solution of microfluidic design, fabrication, bonding and testing, which could provide a theoretical and methodological support for the efficient fabrication of microfluidic chips.</description><subject>Bonding</subject><subject>Chip formation</subject><subject>Control methods</subject><subject>Crystal defects</subject><subject>Electroporation</subject><subject>exposure time</subject><subject>Fabrication</subject><subject>Focusing</subject><subject>Glass substrates</subject><subject>Heating systems</subject><subject>Hot pressing</subject><subject>Hydrodynamic focusing</subject><subject>Hydrodynamics</subject><subject>LCD mask photo-curing</subject><subject>LCDs</subject><subject>Liquid crystal displays</subject><subject>Mathematical analysis</subject><subject>microfluidic chip</subject><subject>Microfluidics</subject><subject>Photocuring</subject><subject>Photosensitivity</subject><subject>Pressure effects</subject><subject>Resins</subject><subject>Surface roughness</subject><subject>Thickness</subject><issn>2169-3536</issn><issn>2169-3536</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>ESBDL</sourceid><sourceid>RIE</sourceid><sourceid>DOA</sourceid><recordid>eNpNkc1O3DAUhaOqlYooT8DGUtcz9V8mzhKlTEEaBNLQtXX9x3ga4mA7i7wCT10PQQhv7Ht8z2frnqq6JHhNCG5_XXXd9X6_ppiSNcM1oRh_qc4o2bQrVrPN10_n79VFSkdclihS3ZxVr_s8mRmFAeWDRQ_RjhAh-1LDYNCjTRkFh25mE4OZB3j2Gm2DnpIfntCd1zG4fvKmqN3Bj2gLKnoN2RqkZrTzL-UOdXFOGXr026exhxndQfqHHg4hh1U3xTeQzYdgflTfHPTJXrzv59Xf7fVjd7Pa3f-57a52K82xyCtjLNMKRK0UEQKoUhYTDo2BhnBaG-G4ZlSoGmtGrHOqMU65jcaca9Moxc6r24VrAhzlGP0zxFkG8PJNCPFJQsxe91YqZ2y7IQDYAW9aJXBdIJwYpWhNxIn1c2GNMbxMZVryGKY4lO9LWgxCCM6a0sWWrjKvlKJ1H68SLE8ZyiVDecpQvmdYXJeLy1trPxwto5i3hP0H5NiazQ</recordid><startdate>2021</startdate><enddate>2021</enddate><creator>Xie, Jiaqing</creator><creator>Meng, Xiaoyu</creator><creator>Pang, Haoran</creator><creator>Yu, Qian</creator><creator>Zhou, Zhikang</creator><creator>Wang, Fangchao</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>ESBDL</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SC</scope><scope>7SP</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope><scope>DOA</scope><orcidid>https://orcid.org/0000-0002-0025-4356</orcidid></search><sort><creationdate>2021</creationdate><title>Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method</title><author>Xie, Jiaqing ; Meng, Xiaoyu ; Pang, Haoran ; Yu, Qian ; Zhou, Zhikang ; Wang, Fangchao</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c408t-dde3cba85bb188a2bbe014a7da71425d8f4c328b50c31effb7dfbf6c044cd7bb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Bonding</topic><topic>Chip formation</topic><topic>Control methods</topic><topic>Crystal defects</topic><topic>Electroporation</topic><topic>exposure time</topic><topic>Fabrication</topic><topic>Focusing</topic><topic>Glass substrates</topic><topic>Heating systems</topic><topic>Hot pressing</topic><topic>Hydrodynamic focusing</topic><topic>Hydrodynamics</topic><topic>LCD mask photo-curing</topic><topic>LCDs</topic><topic>Liquid crystal displays</topic><topic>Mathematical analysis</topic><topic>microfluidic chip</topic><topic>Microfluidics</topic><topic>Photocuring</topic><topic>Photosensitivity</topic><topic>Pressure effects</topic><topic>Resins</topic><topic>Surface roughness</topic><topic>Thickness</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Xie, Jiaqing</creatorcontrib><creatorcontrib>Meng, Xiaoyu</creatorcontrib><creatorcontrib>Pang, Haoran</creatorcontrib><creatorcontrib>Yu, Qian</creatorcontrib><creatorcontrib>Zhou, Zhikang</creatorcontrib><creatorcontrib>Wang, Fangchao</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE Open Access Journals</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Computer and Information Systems Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><collection>DOAJ Directory of Open Access Journals</collection><jtitle>IEEE access</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Xie, Jiaqing</au><au>Meng, Xiaoyu</au><au>Pang, Haoran</au><au>Yu, Qian</au><au>Zhou, Zhikang</au><au>Wang, Fangchao</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method</atitle><jtitle>IEEE access</jtitle><stitle>Access</stitle><date>2021</date><risdate>2021</risdate><volume>9</volume><spage>11533</spage><epage>11542</epage><pages>11533-11542</pages><issn>2169-3536</issn><eissn>2169-3536</eissn><coden>IAECCG</coden><abstract>Microfluidic chips with the function of hydrodynamic focusing is widely used in the field of cell electroporation, droplet formation, drug screening and particle enrichment. Due to the small channel size of microfluidic chip, the existing processing methods have the defects of high fabrication cost or low dimensional consistency, the drawback is particularly prominent at small fabrication quantity. In this study, hydrodynamic focusing microfluidic chip was successfully fabricated by Liquid Crystal Display (LCD) mask photo-curing method with high efficiency and precision, the mechanism of curing parameters on the accuracy of microstructure was investigated, the hot pressing process was proposed to realize the bonding of cured photosensitive resin and glass substrate. By analyzing the focusing width of typical cross structure channel, a hydrodynamic focusing chip was designed. The effects of exposure time and single layer thickness on whole curing time was studied, the factors affecting the surface roughness were investigated, and the dimensional accuracy control method was proposed. The effect of bonding pressure on cured resin temperature was calculated and tested. The focusing width was verified by theoretical calculation and experiment. The mechanism for the inconsistency between the experimental focusing width and the theoretical focusing width was analyzed. The research proposed a solution of microfluidic design, fabrication, bonding and testing, which could provide a theoretical and methodological support for the efficient fabrication of microfluidic chips.</abstract><cop>Piscataway</cop><pub>IEEE</pub><doi>10.1109/ACCESS.2021.3051200</doi><tpages>10</tpages><orcidid>https://orcid.org/0000-0002-0025-4356</orcidid><oa>free_for_read</oa></addata></record> |
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| subjects | Bonding Chip formation Control methods Crystal defects Electroporation exposure time Fabrication Focusing Glass substrates Heating systems Hot pressing Hydrodynamic focusing Hydrodynamics LCD mask photo-curing LCDs Liquid crystal displays Mathematical analysis microfluidic chip Microfluidics Photocuring Photosensitivity Pressure effects Resins Surface roughness Thickness |
| title | Study on the Preparation and Test of Hydrodynamic Focusing Microfluidic Chip Fabricated by Liquid Crystal Display Mask Photo-Curing Method |
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