Statistical SPICE analysis of a 0.18 /spl mu/m CMOS digital/analog technology during process development

This paper gives details of a methodology to extract statistical SPICE models on a developing deep sub micron CMOS technology. The approach uses a TCAD framework which integrates process, device, parameter extraction, and statistics software. The TCAD tools are calibrated by physical and electrical...

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Bibliographische Detailangaben

Hauptverfasser:	Rankin, N.S., Chun Ng, Leang Sern Ee, Boyland, F., Quek, E., Leung Ying Keung, Walton, A.J., Redford, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	CMOS technology Electric variables measurement Length measurement Monte Carlo methods Parameter extraction Process control Semiconductor device modeling SPICE Statistical distributions Testing
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