Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor
A high performance coplanar MEMS microheater based gas sensor, in respect of its portability and power consumption, with enhanced response, has been designed, fabricated and characterized. Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro ma...
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| Veröffentlicht in: | IEEE sensors journal 2020-12, Vol.20 (23), p.14132-14140 |
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| container_issue | 23 |
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| creator | Das, Indranil Bhattacharyya, Raghunath Saha, Hiranmay Ghosh, Sugato |
| description | A high performance coplanar MEMS microheater based gas sensor, in respect of its portability and power consumption, with enhanced response, has been designed, fabricated and characterized. Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro machined silicon substrates. Performance of the microheater was analyzed in terms of power consumption and heat distribution uniformity. Existence of a leakage voltage was detected which was found to reduce the overall sensor performance. Source of this leakage voltage was theoretically and experimentally investigated. To reduce the effect of such leakage voltage on sensor performance, a low drift OPAmp based high gain cancellation circuit was subsequently designed, implemented and an enhanced response of about 70% was observed as against 40% for uncompensated coplanar sensors. An exhaustive sensor characterization study was carried out for different concentrations of methane and performance was analyzed in terms of sensitivity, response, recovery time etc. A sensitivity of about 73% was observed for 5000ppm methane concentration with a moderate response (110 sec) and good recovery (30 sec) time. |
| doi_str_mv | 10.1109/JSEN.2020.3009032 |
| format | Article |
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Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro machined silicon substrates. Performance of the microheater was analyzed in terms of power consumption and heat distribution uniformity. Existence of a leakage voltage was detected which was found to reduce the overall sensor performance. Source of this leakage voltage was theoretically and experimentally investigated. To reduce the effect of such leakage voltage on sensor performance, a low drift OPAmp based high gain cancellation circuit was subsequently designed, implemented and an enhanced response of about 70% was observed as against 40% for uncompensated coplanar sensors. 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Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro machined silicon substrates. Performance of the microheater was analyzed in terms of power consumption and heat distribution uniformity. Existence of a leakage voltage was detected which was found to reduce the overall sensor performance. Source of this leakage voltage was theoretically and experimentally investigated. To reduce the effect of such leakage voltage on sensor performance, a low drift OPAmp based high gain cancellation circuit was subsequently designed, implemented and an enhanced response of about 70% was observed as against 40% for uncompensated coplanar sensors. An exhaustive sensor characterization study was carried out for different concentrations of methane and performance was analyzed in terms of sensitivity, response, recovery time etc. A sensitivity of about 73% was observed for 5000ppm methane concentration with a moderate response (110 sec) and good recovery (30 sec) time.</description><subject>Cancellation circuits</subject><subject>Circuit design</subject><subject>Electric potential</subject><subject>Electric power distribution</subject><subject>Gas detectors</subject><subject>Gas sensor</subject><subject>Gas sensors</subject><subject>Heat distribution</subject><subject>High gain</subject><subject>Leakage</subject><subject>Leakage currents</subject><subject>leakage voltage</subject><subject>MEMS</subject><subject>Methane</subject><subject>micro-heater</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Power consumption</subject><subject>Recovery time</subject><subject>Sensors</subject><subject>Silicon</subject><subject>Silicon substrates</subject><subject>Voltage</subject><issn>1530-437X</issn><issn>1558-1748</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1Lw0AQhhdRsFZ_gHgJeN44-5XNHrXEVmlUrIK3ZbuZ0Jaa1N304L83ocXTDMzzzgwPIdcMUsbA3D0vipeUA4dUABgQ_ISMmFI5ZVrmp0MvgEqhv87JRYwbAGa00iMyK5qVazxWyTvGXdtETNo6mbT0besaF5KyKBdJufahXaHrMNAHF3u4xK6PYTJ1MVlgE9twSc5qt414daxj8vlYfExmdP46fZrcz6nnRnRUGeVMVS219wwrjYxJlUkmlFDgkHNjMqiEU1WWZ6C9kH5ZLwXmWjrU3mViTG4Pe3eh_dlj7Oym3YemP2m5zIAprrXqKXag-sdjDFjbXVh_u_BrGdhBmB2E2UGYPQrrMzeHzBoR_3nDhJH9_A_oSmUW</recordid><startdate>20201201</startdate><enddate>20201201</enddate><creator>Das, Indranil</creator><creator>Bhattacharyya, Raghunath</creator><creator>Saha, Hiranmay</creator><creator>Ghosh, Sugato</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-7803-4804</orcidid></search><sort><creationdate>20201201</creationdate><title>Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor</title><author>Das, Indranil ; Bhattacharyya, Raghunath ; Saha, Hiranmay ; Ghosh, Sugato</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-595a9ddb7cc1ed7e114564135350ae229960d3a5d68607c34cbfb3e874ae7ca63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Cancellation circuits</topic><topic>Circuit design</topic><topic>Electric potential</topic><topic>Electric power distribution</topic><topic>Gas detectors</topic><topic>Gas sensor</topic><topic>Gas sensors</topic><topic>Heat distribution</topic><topic>High gain</topic><topic>Leakage</topic><topic>Leakage currents</topic><topic>leakage voltage</topic><topic>MEMS</topic><topic>Methane</topic><topic>micro-heater</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Power consumption</topic><topic>Recovery time</topic><topic>Sensors</topic><topic>Silicon</topic><topic>Silicon substrates</topic><topic>Voltage</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Das, Indranil</creatorcontrib><creatorcontrib>Bhattacharyya, Raghunath</creatorcontrib><creatorcontrib>Saha, Hiranmay</creatorcontrib><creatorcontrib>Ghosh, Sugato</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE sensors journal</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Das, Indranil</au><au>Bhattacharyya, Raghunath</au><au>Saha, Hiranmay</au><au>Ghosh, Sugato</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor</atitle><jtitle>IEEE sensors journal</jtitle><stitle>JSEN</stitle><date>2020-12-01</date><risdate>2020</risdate><volume>20</volume><issue>23</issue><spage>14132</spage><epage>14140</epage><pages>14132-14140</pages><issn>1530-437X</issn><eissn>1558-1748</eissn><coden>ISJEAZ</coden><abstract>A high performance coplanar MEMS microheater based gas sensor, in respect of its portability and power consumption, with enhanced response, has been designed, fabricated and characterized. Pt microheater, along with interdigitated electrodes (IDE) and Methane sensing layer were deposited on micro machined silicon substrates. Performance of the microheater was analyzed in terms of power consumption and heat distribution uniformity. Existence of a leakage voltage was detected which was found to reduce the overall sensor performance. Source of this leakage voltage was theoretically and experimentally investigated. To reduce the effect of such leakage voltage on sensor performance, a low drift OPAmp based high gain cancellation circuit was subsequently designed, implemented and an enhanced response of about 70% was observed as against 40% for uncompensated coplanar sensors. An exhaustive sensor characterization study was carried out for different concentrations of methane and performance was analyzed in terms of sensitivity, response, recovery time etc. A sensitivity of about 73% was observed for 5000ppm methane concentration with a moderate response (110 sec) and good recovery (30 sec) time.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSEN.2020.3009032</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0002-7803-4804</orcidid></addata></record> |
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| subjects | Cancellation circuits Circuit design Electric potential Electric power distribution Gas detectors Gas sensor Gas sensors Heat distribution High gain Leakage Leakage currents leakage voltage MEMS Methane micro-heater Microelectromechanical systems Micromechanical devices Power consumption Recovery time Sensors Silicon Silicon substrates Voltage |
| title | Enhanced Response of Co-Planar MEMS Microheater-Based Methane Gas Sensor |
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