Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning

Odd-harmonic repetitive control (ORC) has been successfully applied to improve the triangular trajectory tracking performance of nanopositioners. However, the conventional ORC tends to amplify the tracking errors at frequencies other than the odd-harmonic components, mainly the even harmonics of the...

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Veröffentlicht in:	IEEE transactions on automation science and engineering 2021-07, Vol.18 (3), p.1087-1096
Hauptverfasser:	Li, Linlin, Aphale, Sumeet S., Zhu, LiMin
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplification Atomic force microscopy Computation Control stability Control systems design Controllers Convergence Filtration Harmonic analysis Harmonic control High speed Hysteresis Nanopositioning Nanopositioning stages Nonlinearity odd-harmonic repetitive control (ORC) Performance evaluation Piezoelectric actuators Raster Raster scanning Repetitive control Resonant frequencies spectrum-selection filter Stability analysis Tracking control Tracking errors
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