A quantum cascade laser using a native-oxide-defined current aperture and optical waveguide
Summary form only. The long wavelength of quantum cascade (QC) lasers mediates against good confinement of the optical mode to the waveguide core and so a thick, 'plasma-enhanced' waveguide is normally used. We report a fabrication technique which provides electrical and optical confinemen...
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| creator | Farmer, C.D. Keightley, P.T. Ironside, C.N. Stanley, C.R. Wilson, L.R. Cockburn, J.W. |
| description | Summary form only. The long wavelength of quantum cascade (QC) lasers mediates against good confinement of the optical mode to the waveguide core and so a thick, 'plasma-enhanced' waveguide is normally used. We report a fabrication technique which provides electrical and optical confinement by conversion (rather than removal) of the Al/sub 0.48/In/sub 0.52/As upper cladding to a native oxide. In this technique, planar (vertical) selective thermal wet oxidation (PSWOX), the oxidation reaction begins at the AlInAs surface and proceeds downwards through the semiconductor using H/sub 2/O to convert the AlInAs into an oxide mainly composed of amorphous matrix (AlO/sub x/, As), with crystallised In/sub 2/O/sub 3/. |
| doi_str_mv | 10.1109/CLEOE.2000.909821 |
| format | Conference Proceeding |
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In this technique, planar (vertical) selective thermal wet oxidation (PSWOX), the oxidation reaction begins at the AlInAs surface and proceeds downwards through the semiconductor using H/sub 2/O to convert the AlInAs into an oxide mainly composed of amorphous matrix (AlO/sub x/, As), with crystallised In/sub 2/O/sub 3/.</description><identifier>ISBN: 0780363191</identifier><identifier>ISBN: 9780780363199</identifier><identifier>DOI: 10.1109/CLEOE.2000.909821</identifier><language>eng</language><publisher>IEEE</publisher><subject>Amorphous materials ; Laser modes ; Optical device fabrication ; Optical surface waves ; Optical waveguides ; Oxidation ; Plasma confinement ; Plasma waves ; Quantum cascade lasers ; Waveguide lasers</subject><ispartof>Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. 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No.00TH8505)</title><addtitle>CLEOE</addtitle><description>Summary form only. The long wavelength of quantum cascade (QC) lasers mediates against good confinement of the optical mode to the waveguide core and so a thick, 'plasma-enhanced' waveguide is normally used. We report a fabrication technique which provides electrical and optical confinement by conversion (rather than removal) of the Al/sub 0.48/In/sub 0.52/As upper cladding to a native oxide. In this technique, planar (vertical) selective thermal wet oxidation (PSWOX), the oxidation reaction begins at the AlInAs surface and proceeds downwards through the semiconductor using H/sub 2/O to convert the AlInAs into an oxide mainly composed of amorphous matrix (AlO/sub x/, As), with crystallised In/sub 2/O/sub 3/.</description><subject>Amorphous materials</subject><subject>Laser modes</subject><subject>Optical device fabrication</subject><subject>Optical surface waves</subject><subject>Optical waveguides</subject><subject>Oxidation</subject><subject>Plasma confinement</subject><subject>Plasma waves</subject><subject>Quantum cascade lasers</subject><subject>Waveguide lasers</subject><isbn>0780363191</isbn><isbn>9780780363199</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2000</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jrkKAjEUAAMieH6AVu8Hdn0xeKQUWbEQbOws5LF5SmSNaw6Pv1fQ2mqKmWKEGEjMpUQ9Wm6KbZGPETHXqOdj2RAdnM1RTZXUsiX6IZw_EpWeqOmsLfYLuCVyMV2gpFCSYagosIcUrDsBgaNo75xdn9ZwZvhoHRsok_fsIlDNPibPQM7AtY62pAoedOdT-uQ90TxSFbj_Y1cMV8Vuuc4sMx9qby_kX4fvpvor33iIQqo</recordid><startdate>2000</startdate><enddate>2000</enddate><creator>Farmer, C.D.</creator><creator>Keightley, P.T.</creator><creator>Ironside, C.N.</creator><creator>Stanley, C.R.</creator><creator>Wilson, L.R.</creator><creator>Cockburn, J.W.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>2000</creationdate><title>A quantum cascade laser using a native-oxide-defined current aperture and optical waveguide</title><author>Farmer, C.D. ; Keightley, P.T. ; Ironside, C.N. ; Stanley, C.R. ; Wilson, L.R. ; Cockburn, J.W.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_9098213</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2000</creationdate><topic>Amorphous materials</topic><topic>Laser modes</topic><topic>Optical device fabrication</topic><topic>Optical surface waves</topic><topic>Optical waveguides</topic><topic>Oxidation</topic><topic>Plasma confinement</topic><topic>Plasma waves</topic><topic>Quantum cascade lasers</topic><topic>Waveguide lasers</topic><toplevel>online_resources</toplevel><creatorcontrib>Farmer, C.D.</creatorcontrib><creatorcontrib>Keightley, P.T.</creatorcontrib><creatorcontrib>Ironside, C.N.</creatorcontrib><creatorcontrib>Stanley, C.R.</creatorcontrib><creatorcontrib>Wilson, L.R.</creatorcontrib><creatorcontrib>Cockburn, J.W.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Farmer, C.D.</au><au>Keightley, P.T.</au><au>Ironside, C.N.</au><au>Stanley, C.R.</au><au>Wilson, L.R.</au><au>Cockburn, J.W.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A quantum cascade laser using a native-oxide-defined current aperture and optical waveguide</atitle><btitle>Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. 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| identifier | ISBN: 0780363191 |
| ispartof | Conference Digest. 2000 Conference on Lasers and Electro-Optics Europe (Cat. No.00TH8505), 2000, p.1 pp. |
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| language | eng |
| recordid | cdi_ieee_primary_909821 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Amorphous materials Laser modes Optical device fabrication Optical surface waves Optical waveguides Oxidation Plasma confinement Plasma waves Quantum cascade lasers Waveguide lasers |
| title | A quantum cascade laser using a native-oxide-defined current aperture and optical waveguide |
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