High-Sensitivity Flexible Pressure Sensor With Low Working Voltage Based on Sphenoid Microstructure

Flexible pressure sensors have attracted significant attention in field of electronic skin, medical equipment, and soft robotics. However, the poor sensing performance and high working voltage have hindered their practical applications. Here, a low-voltage wearable pressure sensor with high sensitiv...

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Veröffentlicht in:IEEE sensors journal 2020-07, Vol.20 (13), p.7354-7361
Hauptverfasser: Wang, Yaling, Zhu, Wei, Yu, Yuedong, Zhu, Pengcheng, Song, Qingsong, Deng, Yuan
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container_end_page 7361
container_issue 13
container_start_page 7354
container_title IEEE sensors journal
container_volume 20
creator Wang, Yaling
Zhu, Wei
Yu, Yuedong
Zhu, Pengcheng
Song, Qingsong
Deng, Yuan
description Flexible pressure sensors have attracted significant attention in field of electronic skin, medical equipment, and soft robotics. However, the poor sensing performance and high working voltage have hindered their practical applications. Here, a low-voltage wearable pressure sensor with high sensitivity in a large useable range is demonstrated. The pressure sensor has been designed with a random distributed sphenoid surface and highly conductive silver films, exhibiting an excellent sensitivity of 5.9 kPa −1 with a wide linearity of 0-15 kPa and ultralow operating voltage of 20 mV. Meanwhile, the flexible pressure sensor could be used for sensitively monitoring human physiological signals, such as wrist pulse, voice recognition, and human activities. Furthermore, a resistive pressure sensor array has been applied for detecting the spatial distribution of external pressure, indicating huge potential as wearable detectors for self-powered real-time monitoring human healthcare.
doi_str_mv 10.1109/JSEN.2020.2978655
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subjects body heat energy
Electric potential
Electrodes
External pressure
Flexible pressure sensor
healthcare monitoring
Linearity
Medical equipment
Microstructure
Pressure sensors
Robotics
sensing performance
Sensitivity
Sensor arrays
Sensors
Signal monitoring
Spatial distribution
sphenoid surface
Stress concentration
Surface morphology
Telemedicine
Voice recognition
Voltage
Wearable technology
Wrist
title High-Sensitivity Flexible Pressure Sensor With Low Working Voltage Based on Sphenoid Microstructure
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