Optimal Control for X-Ray Microscopes

In this article, a systematic framework for designing the control for fine positioning (scanning) stages of X-ray microscopes is presented. This framework facilitates designs that simultaneously achieve specifications on positioning resolution and tracking bandwidth while guaranteeing robustness of...

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Veröffentlicht in:	IEEE/ASME transactions on mechatronics 2020-04, Vol.25 (2), p.627-637
Hauptverfasser:	Mashrafi, Sheikh T., Deng, Junjing, Preissner, Curt, Salapaka, Srinivasa M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bandwidth Closed loops Control systems design Control theory Design Disturbance rejection Flexing Microscopes Microscopy nanopositioning system noise attenuation Optical microscopy Optimal control positioning resolution Proportional integral derivative Robust control Spatial resolution Tracking tracking bandwidth Transfer functions X ray imagery X ray optics X-ray imaging X-ray microscope
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