3D Geometric Engineering of the Double Wedge-Like Electrodes for Filament-Type RRAM Device Performance Improvement

The resistive switching variability and reliability degradation are the two major challenges that hinder the high-volume production of the Resistive Random Access Memory (RRAM) devices. In this work, a 3D electrode structure engineering method is proposed. The geometric parameters defined as electro...

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Veröffentlicht in:IEEE access 2020, Vol.8, p.4924-4934
Hauptverfasser: Sun, Jianxun, Li, Yuan Bo, Ye, Yiyang, Zhang, Jun, Chong, Gang Yih, Tan, Juan Boon, Liu, Zhen, Chen, Tupei
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container_issue
container_start_page 4924
container_title IEEE access
container_volume 8
creator Sun, Jianxun
Li, Yuan Bo
Ye, Yiyang
Zhang, Jun
Chong, Gang Yih
Tan, Juan Boon
Liu, Zhen
Chen, Tupei
description The resistive switching variability and reliability degradation are the two major challenges that hinder the high-volume production of the Resistive Random Access Memory (RRAM) devices. In this work, a 3D electrode structure engineering method is proposed. The geometric parameters defined as electrode angle (EA), electrodes spacing (ES) and electrode trench depth (ETD) associated with the double wedge-like electrodes of the filament-type RRAM devices are studied for the first time. Our experimental results show that apart from the resistive switching uniformity, the reliability performance such as cycling endurance and data retention are significantly improved for the device with small EA (90°), narrow ES (440 nm) and deep ETD (90 nm) owing to the electric field confinement and enhancement. Thus, this new approach can be served as a guideline for the design and optimization of the filament-type RRAM devices.
doi_str_mv 10.1109/ACCESS.2019.2962869
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subjects Design optimization
Electric fields
Electrode structure engineering
Electrodes
Memory devices
Random access memory
Reliability
resistive switching uniformity
RRAM device reliability
Switching
Wedges
title 3D Geometric Engineering of the Double Wedge-Like Electrodes for Filament-Type RRAM Device Performance Improvement
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