Improvement of Endurance in HZO-Based Ferroelectric Capacitor Using Ru Electrode

In this letter, the endurance property of Hf 0.5 Zr 0.5 O 2 (HZO) based ferroelectric capacitor has been improved using Ru electrodes. Compared to the widely used TiN/HZO/TiN capacitor, the Ru/HZO/Ru capacitor shows comparable remnant polarization (~.20μC/cm 2 ), lower leakage current (5.67×10 -5 A/...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE electron device letters 2019-11, Vol.40 (11), p.1744-1747
Hauptverfasser:	Cao, Rongrong, Liu, Qi, Liu, Ming, Song, Bing, Shang, Dashan, Yang, Yang, Luo, Qing, Wu, Shuyu, Li, Yue, Wang, Yan, Lv, Hangbing
Format:	Artikel
Sprache:	eng
Schlagworte:	Breakdown breakdown field Capacitors Durability Electric breakdown Electric fields Electrode polarization Electrodes Endurance endurance property Ferroelectric materials Ferroelectricity Hafnium compounds Leakage current Leakage currents Ru/HZO/Ru Thin films Tin
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!