Demonstration of low voltage field emission

The authors describe field emission from a thin-film field emitter array. The process used to fabricate the field emitters is based on the mold technique described by H.F. Gray and R.F. Greene (US patent 4,307,507). Each emitter chip consists of a 10*10 square array of field emitter tips and associa...

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Veröffentlicht in:	IEEE transactions on electron devices 1991-10, Vol.38 (10), p.2304-2308
Hauptverfasser:	Adler, E.A., Bardai, Z., Forman, R., Goebel, D.M., Longo, R.T., Sokolich, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Anodes Bonding Current measurement Field emitter arrays Low voltage Packaging Semiconductor device measurement Substrates Testing Transistors
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