Optical Fiber Fabry-Perot Acoustic Sensors Based on Corrugated Silver Diaphragms
In this article, we fabricated and tested a series of extrinsic fiber Fabry-Perot interferometric acoustic sensors based on the corrugated silver diaphragms. These diaphragms were fabricated through a simple and low-cost method. The corrugations were first etched on the silicon surface permanently a...
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| Veröffentlicht in: | IEEE transactions on instrumentation and measurement 2020-06, Vol.69 (6), p.3874-3881 |
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| container_title | IEEE transactions on instrumentation and measurement |
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| creator | Liu, Bin Zheng, Guangqi Wang, Ailin Gui, Chenyang Yu, Haichao Shan, Mingguang Jin, Peng Zhong, Zhi |
| description | In this article, we fabricated and tested a series of extrinsic fiber Fabry-Perot interferometric acoustic sensors based on the corrugated silver diaphragms. These diaphragms were fabricated through a simple and low-cost method. The corrugations were first etched on the silicon surface permanently and then transferred to the silver diaphragm with the help of photoresist as the sacrificial layer. The sensors with different corrugation depths were fabricated. The experimental results showed the same trend with the theoretical results on the mechanical sensitivities of the fabricated corrugated diaphragms, which first increased and then decreased with the increase in the corruption's depth. Other characteristics of the fabricated optical acoustic sensors based on the corrugated silver diaphragms were also tested in detail. The proposed fabrication method of the corrugated diaphragm showed the advantages of simplicity and low cost, and the acoustic sensors showed high sensitivity, which was suitable for weak acoustic's sensing. |
| doi_str_mv | 10.1109/TIM.2019.2939766 |
| format | Article |
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These diaphragms were fabricated through a simple and low-cost method. The corrugations were first etched on the silicon surface permanently and then transferred to the silver diaphragm with the help of photoresist as the sacrificial layer. The sensors with different corrugation depths were fabricated. The experimental results showed the same trend with the theoretical results on the mechanical sensitivities of the fabricated corrugated diaphragms, which first increased and then decreased with the increase in the corruption's depth. Other characteristics of the fabricated optical acoustic sensors based on the corrugated silver diaphragms were also tested in detail. The proposed fabrication method of the corrugated diaphragm showed the advantages of simplicity and low cost, and the acoustic sensors showed high sensitivity, which was suitable for weak acoustic's sensing.</description><identifier>ISSN: 0018-9456</identifier><identifier>EISSN: 1557-9662</identifier><identifier>DOI: 10.1109/TIM.2019.2939766</identifier><identifier>CODEN: IEIMAO</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acoustic sensor ; Acoustic sensors ; Acoustics ; corrugated silver diaphragm ; Diaphragms ; Fabry–Perot ; fiber ; Low cost ; Optical fiber sensors ; Optical fibers ; Photoresists ; Sensitivity ; Sensors ; Silicon ; Silver ; Sonar</subject><ispartof>IEEE transactions on instrumentation and measurement, 2020-06, Vol.69 (6), p.3874-3881</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2020</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c291t-e43011bdd0c8584a4a8cd6e310aee78a2ce7e6cfe3650ea396eeea29abfb55283</citedby><cites>FETCH-LOGICAL-c291t-e43011bdd0c8584a4a8cd6e310aee78a2ce7e6cfe3650ea396eeea29abfb55283</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8827565$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/8827565$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Liu, Bin</creatorcontrib><creatorcontrib>Zheng, Guangqi</creatorcontrib><creatorcontrib>Wang, Ailin</creatorcontrib><creatorcontrib>Gui, Chenyang</creatorcontrib><creatorcontrib>Yu, Haichao</creatorcontrib><creatorcontrib>Shan, Mingguang</creatorcontrib><creatorcontrib>Jin, Peng</creatorcontrib><creatorcontrib>Zhong, Zhi</creatorcontrib><title>Optical Fiber Fabry-Perot Acoustic Sensors Based on Corrugated Silver Diaphragms</title><title>IEEE transactions on instrumentation and measurement</title><addtitle>TIM</addtitle><description>In this article, we fabricated and tested a series of extrinsic fiber Fabry-Perot interferometric acoustic sensors based on the corrugated silver diaphragms. These diaphragms were fabricated through a simple and low-cost method. The corrugations were first etched on the silicon surface permanently and then transferred to the silver diaphragm with the help of photoresist as the sacrificial layer. The sensors with different corrugation depths were fabricated. The experimental results showed the same trend with the theoretical results on the mechanical sensitivities of the fabricated corrugated diaphragms, which first increased and then decreased with the increase in the corruption's depth. Other characteristics of the fabricated optical acoustic sensors based on the corrugated silver diaphragms were also tested in detail. The proposed fabrication method of the corrugated diaphragm showed the advantages of simplicity and low cost, and the acoustic sensors showed high sensitivity, which was suitable for weak acoustic's sensing.</description><subject>Acoustic sensor</subject><subject>Acoustic sensors</subject><subject>Acoustics</subject><subject>corrugated silver diaphragm</subject><subject>Diaphragms</subject><subject>Fabry–Perot</subject><subject>fiber</subject><subject>Low cost</subject><subject>Optical fiber sensors</subject><subject>Optical fibers</subject><subject>Photoresists</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Silicon</subject><subject>Silver</subject><subject>Sonar</subject><issn>0018-9456</issn><issn>1557-9662</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kNFLwzAQh4MoOKfvgi8FnzuTtEmTxzmdDiYbbD6Ha3qdHdtSk1bYf29kw6fjuN93P_gIuWd0xBjVT-vZx4hTpkdcZ7qQ8oIMmBBFqqXkl2RAKVOpzoW8JjchbCmlhcyLAVku2q6xsEumTYk-mULpj-kSveuSsXV9iMdkhYfgfEieIWCVuEMycd73G-jitmp2P5F7aaD98rDZh1tyVcMu4N15Dsnn9HU9eU_ni7fZZDxPLdesSzHPKGNlVVGrhMohB2UriRmjgFgo4BYLlLbGTAqKkGmJiMA1lHUpBFfZkDye_rbeffcYOrN1vT_ESsNzynMtVDQxJPSUst6F4LE2rW_24I-GUfPnzURv5s-bOXuLyMMJaWLjf1wpXggpsl-V3mm6</recordid><startdate>20200601</startdate><enddate>20200601</enddate><creator>Liu, Bin</creator><creator>Zheng, Guangqi</creator><creator>Wang, Ailin</creator><creator>Gui, Chenyang</creator><creator>Yu, Haichao</creator><creator>Shan, Mingguang</creator><creator>Jin, Peng</creator><creator>Zhong, Zhi</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20200601</creationdate><title>Optical Fiber Fabry-Perot Acoustic Sensors Based on Corrugated Silver Diaphragms</title><author>Liu, Bin ; Zheng, Guangqi ; Wang, Ailin ; Gui, Chenyang ; Yu, Haichao ; Shan, Mingguang ; Jin, Peng ; Zhong, Zhi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c291t-e43011bdd0c8584a4a8cd6e310aee78a2ce7e6cfe3650ea396eeea29abfb55283</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Acoustic sensor</topic><topic>Acoustic sensors</topic><topic>Acoustics</topic><topic>corrugated silver diaphragm</topic><topic>Diaphragms</topic><topic>Fabry–Perot</topic><topic>fiber</topic><topic>Low cost</topic><topic>Optical fiber sensors</topic><topic>Optical fibers</topic><topic>Photoresists</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Silicon</topic><topic>Silver</topic><topic>Sonar</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Liu, Bin</creatorcontrib><creatorcontrib>Zheng, Guangqi</creatorcontrib><creatorcontrib>Wang, Ailin</creatorcontrib><creatorcontrib>Gui, Chenyang</creatorcontrib><creatorcontrib>Yu, Haichao</creatorcontrib><creatorcontrib>Shan, Mingguang</creatorcontrib><creatorcontrib>Jin, Peng</creatorcontrib><creatorcontrib>Zhong, Zhi</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on instrumentation and measurement</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Liu, Bin</au><au>Zheng, Guangqi</au><au>Wang, Ailin</au><au>Gui, Chenyang</au><au>Yu, Haichao</au><au>Shan, Mingguang</au><au>Jin, Peng</au><au>Zhong, Zhi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical Fiber Fabry-Perot Acoustic Sensors Based on Corrugated Silver Diaphragms</atitle><jtitle>IEEE transactions on instrumentation and measurement</jtitle><stitle>TIM</stitle><date>2020-06-01</date><risdate>2020</risdate><volume>69</volume><issue>6</issue><spage>3874</spage><epage>3881</epage><pages>3874-3881</pages><issn>0018-9456</issn><eissn>1557-9662</eissn><coden>IEIMAO</coden><abstract>In this article, we fabricated and tested a series of extrinsic fiber Fabry-Perot interferometric acoustic sensors based on the corrugated silver diaphragms. These diaphragms were fabricated through a simple and low-cost method. The corrugations were first etched on the silicon surface permanently and then transferred to the silver diaphragm with the help of photoresist as the sacrificial layer. The sensors with different corrugation depths were fabricated. The experimental results showed the same trend with the theoretical results on the mechanical sensitivities of the fabricated corrugated diaphragms, which first increased and then decreased with the increase in the corruption's depth. Other characteristics of the fabricated optical acoustic sensors based on the corrugated silver diaphragms were also tested in detail. The proposed fabrication method of the corrugated diaphragm showed the advantages of simplicity and low cost, and the acoustic sensors showed high sensitivity, which was suitable for weak acoustic's sensing.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TIM.2019.2939766</doi><tpages>8</tpages></addata></record> |
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| subjects | Acoustic sensor Acoustic sensors Acoustics corrugated silver diaphragm Diaphragms Fabry–Perot fiber Low cost Optical fiber sensors Optical fibers Photoresists Sensitivity Sensors Silicon Silver Sonar |
| title | Optical Fiber Fabry-Perot Acoustic Sensors Based on Corrugated Silver Diaphragms |
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