CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable Filters
A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated sensor electrode and a proportional-integral controller was designed to have a sensitivity of 1 fF, a settling time of 200 μs, and a voltage capacity of 150 V. In a hybrid integration with a MEMS varactor, the c...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2019-10, Vol.28 (5), p.910-918 |
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| container_issue | 5 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Asadi, Mohammad Javad Jin, Renfeng Ding, Guanghai Hwang, James C. M. Scarbrough, Derek Goldsmith, Charles L. |
| description | A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated sensor electrode and a proportional-integral controller was designed to have a sensitivity of 1 fF, a settling time of 200 μs, and a voltage capacity of 150 V. In a hybrid integration with a MEMS varactor, the control circuit could switch the varactor capacitance from 270 to 365 fF in 15 ms and hold it within ±2% between 25 °C and 80 °C. Furthermore, using the varactor as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit could tune its resonance frequency from 33.2 to 33.9 GHz while keeping it within ±0.08% over a temperature range of 25 °C-90 °C. The control circuit occupied an area of 1.7 mm 2 and consumed 6 mW. The present closed-loop-controlled MEMS-tunable resonators could be used in a quartz SIW multi-pole filter to realize tunable, small, light, low-cost, robust, and reliable millimeter-wave filters that are critical to 5G and other future-generation communication and radar systems. |
| doi_str_mv | 10.1109/JMEMS.2019.2929469 |
| format | Article |
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M. ; Scarbrough, Derek ; Goldsmith, Charles L.</creator><creatorcontrib>Asadi, Mohammad Javad ; Jin, Renfeng ; Ding, Guanghai ; Hwang, James C. M. ; Scarbrough, Derek ; Goldsmith, Charles L.</creatorcontrib><description>A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated sensor electrode and a proportional-integral controller was designed to have a sensitivity of 1 fF, a settling time of 200 μs, and a voltage capacity of 150 V. In a hybrid integration with a MEMS varactor, the control circuit could switch the varactor capacitance from 270 to 365 fF in 15 ms and hold it within ±2% between 25 °C and 80 °C. Furthermore, using the varactor as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit could tune its resonance frequency from 33.2 to 33.9 GHz while keeping it within ±0.08% over a temperature range of 25 °C-90 °C. The control circuit occupied an area of 1.7 mm 2 and consumed 6 mW. The present closed-loop-controlled MEMS-tunable resonators could be used in a quartz SIW multi-pole filter to realize tunable, small, light, low-cost, robust, and reliable millimeter-wave filters that are critical to 5G and other future-generation communication and radar systems.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2019.2929469</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Capacitance ; Capacitance–voltage characteristics ; Circuit design ; closed-loop control ; CMOS ; Control systems design ; Electrodes ; Electromagnetic wave filters ; high-voltage switch ; Microelectromechanical systems ; Micromechanical devices ; Millimeter waves ; Proportional integral ; Radar equipment ; radio-frequency micro-electromechanical systems ; Resonators ; Sensors ; Substrates ; Switches ; temperature stability ; Tunable filters ; Tuning ; Varactor diodes ; Varactors</subject><ispartof>Journal of microelectromechanical systems, 2019-10, Vol.28 (5), p.910-918</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. 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M.</creatorcontrib><creatorcontrib>Scarbrough, Derek</creatorcontrib><creatorcontrib>Goldsmith, Charles L.</creatorcontrib><title>CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable Filters</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated sensor electrode and a proportional-integral controller was designed to have a sensitivity of 1 fF, a settling time of 200 μs, and a voltage capacity of 150 V. In a hybrid integration with a MEMS varactor, the control circuit could switch the varactor capacitance from 270 to 365 fF in 15 ms and hold it within ±2% between 25 °C and 80 °C. Furthermore, using the varactor as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit could tune its resonance frequency from 33.2 to 33.9 GHz while keeping it within ±0.08% over a temperature range of 25 °C-90 °C. The control circuit occupied an area of 1.7 mm 2 and consumed 6 mW. The present closed-loop-controlled MEMS-tunable resonators could be used in a quartz SIW multi-pole filter to realize tunable, small, light, low-cost, robust, and reliable millimeter-wave filters that are critical to 5G and other future-generation communication and radar systems.</description><subject>Capacitance</subject><subject>Capacitance–voltage characteristics</subject><subject>Circuit design</subject><subject>closed-loop control</subject><subject>CMOS</subject><subject>Control systems design</subject><subject>Electrodes</subject><subject>Electromagnetic wave filters</subject><subject>high-voltage switch</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Millimeter waves</subject><subject>Proportional integral</subject><subject>Radar equipment</subject><subject>radio-frequency micro-electromechanical systems</subject><subject>Resonators</subject><subject>Sensors</subject><subject>Substrates</subject><subject>Switches</subject><subject>temperature stability</subject><subject>Tunable filters</subject><subject>Tuning</subject><subject>Varactor diodes</subject><subject>Varactors</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNotjb1OwzAURi0EEqXwArBYYk7xzbVje4SI8teoEi2skRPbUqoQFzsZeHuKyvSd4eh8hFwDWwAwffdaPVabRc5AL3Kda17oEzIDzSFjINTpgZmQmQQhz8lFSjvGgHNVzEhVVusNLfuQnM1WIexpGYYxhp4GT_-i9NNE044hJupDpO-hmdJI30z2YAZLt9Ngmt7RZdePLqZLcuZNn9zV_87Jx_JxWz5nq_XTS3m_yjoANWaotQK0YAznViJajsrZ3EvfyAYBRcPBO5-DReZYI7w2uRJC-xZbV7QFzsntsbuP4Xtyaax3YYrD4bLOkTFEpREP1s3R6pxz9T52Xyb-1EpKiUzjL8IhV8o</recordid><startdate>20191001</startdate><enddate>20191001</enddate><creator>Asadi, Mohammad Javad</creator><creator>Jin, Renfeng</creator><creator>Ding, Guanghai</creator><creator>Hwang, James C. 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Furthermore, using the varactor as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit could tune its resonance frequency from 33.2 to 33.9 GHz while keeping it within ±0.08% over a temperature range of 25 °C-90 °C. The control circuit occupied an area of 1.7 mm 2 and consumed 6 mW. The present closed-loop-controlled MEMS-tunable resonators could be used in a quartz SIW multi-pole filter to realize tunable, small, light, low-cost, robust, and reliable millimeter-wave filters that are critical to 5G and other future-generation communication and radar systems.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2019.2929469</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0001-6331-8364</orcidid></addata></record> |
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| source | IEEE Electronic Library (IEL) |
| subjects | Capacitance Capacitance–voltage characteristics Circuit design closed-loop control CMOS Control systems design Electrodes Electromagnetic wave filters high-voltage switch Microelectromechanical systems Micromechanical devices Millimeter waves Proportional integral Radar equipment radio-frequency micro-electromechanical systems Resonators Sensors Substrates Switches temperature stability Tunable filters Tuning Varactor diodes Varactors |
| title | CMOS Closed-Loop Control of MEMS Varactors for Robust Ka-Band Tunable Filters |
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