Electron scattering and related phenomena in SCALPEL/sup TM

Summary form only given. Various scattering phenomena involved with the energetic (100 keV) electrons carrying the mask pattern information to the wafer through the projection optics are discussed. These phenomena can be grouped into three major categories. (i) Elastic electron scattering in the mas...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Mkrtchyan, M.M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Analytical models Biomembranes Electron beams Electron optics Energy resolution Image resolution Optical scattering Space charge Space heating Throughput
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