Accurate Inductance Modeling of 3-D Inductor Based on TSV

In this letter, an accurate model for the inductance of 3-D integrated inductor based on through silicon via is proposed. The model, considering both the internal inductance and detailed calculation of redistribution layer inductance, can more precisely obtain the total inductance of 3-D inductor us...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE microwave and wireless components letters 2018-10, Vol.28 (10), p.900-902
Hauptverfasser: Gou, Shilong, Dong, Gang, Mei, Zheng, Yang, Yintang
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 902
container_issue 10
container_start_page 900
container_title IEEE microwave and wireless components letters
container_volume 28
creator Gou, Shilong
Dong, Gang
Mei, Zheng
Yang, Yintang
description In this letter, an accurate model for the inductance of 3-D integrated inductor based on through silicon via is proposed. The model, considering both the internal inductance and detailed calculation of redistribution layer inductance, can more precisely obtain the total inductance of 3-D inductor using negligible computational time. Compared with the results of the Q3D extractor, the inductance results obtained from the proposed model exhibit good agreement with various design parameter ranges. The maximum error is less than 3.5%, so our model achieves high accuracy.
doi_str_mv 10.1109/LMWC.2018.2867089
format Article
fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_8457247</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>8457247</ieee_id><sourcerecordid>2117187937</sourcerecordid><originalsourceid>FETCH-LOGICAL-c293t-1ba395f21347ff8d50c43c9c6d3f81dc84315564ef6cc421b1a1cf4c77cdaac33</originalsourceid><addsrcrecordid>eNo9kE1LAzEQhoMoWKs_QLwEPG_NJNlNcqz1q9DiwarHkM4m0lI3Ndk9-O_dpcXTDMzzzgwPIdfAJgDM3C2Wn7MJZ6AnXFeKaXNCRlCWugBVydOhF1CAYOacXOS8ZQykljAiZorYJdd6Om_qDlvXoKfLWPvdpvmiMVBRPBxHMdF7l31NY0NXbx-X5Cy4XfZXxzom70-Pq9lLsXh9ns-miwK5EW0BaydMGTgIqULQdclQCjRY1SJoqFFL0f9ZSR8qRMlhDQ4wSFQKa-dQiDG5Pezdp_jT-dzabexS05-0HECBVkaonoIDhSnmnHyw-7T5dunXArODITsYsoMhezTUZ24OmY33_p_XslRcKvEHC-lf7w</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2117187937</pqid></control><display><type>article</type><title>Accurate Inductance Modeling of 3-D Inductor Based on TSV</title><source>IEEE Electronic Library (IEL)</source><creator>Gou, Shilong ; Dong, Gang ; Mei, Zheng ; Yang, Yintang</creator><creatorcontrib>Gou, Shilong ; Dong, Gang ; Mei, Zheng ; Yang, Yintang</creatorcontrib><description>In this letter, an accurate model for the inductance of 3-D integrated inductor based on through silicon via is proposed. The model, considering both the internal inductance and detailed calculation of redistribution layer inductance, can more precisely obtain the total inductance of 3-D inductor using negligible computational time. Compared with the results of the Q3D extractor, the inductance results obtained from the proposed model exhibit good agreement with various design parameter ranges. The maximum error is less than 3.5%, so our model achieves high accuracy.</description><identifier>ISSN: 1531-1309</identifier><identifier>ISSN: 2771-957X</identifier><identifier>EISSN: 1558-1764</identifier><identifier>EISSN: 2771-9588</identifier><identifier>DOI: 10.1109/LMWC.2018.2867089</identifier><identifier>CODEN: IMWCBJ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>3-D integrated inductor ; Computational modeling ; Computing time ; Design parameters ; Inductance ; inductance model ; Inductors ; Integrated circuits ; Interconnections ; Model accuracy ; redistribution layers (RDL) ; Silicon ; Solid modeling ; Three dimensional models ; through silicon via (TSV) ; Through-silicon vias ; Wireless communication</subject><ispartof>IEEE microwave and wireless components letters, 2018-10, Vol.28 (10), p.900-902</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c293t-1ba395f21347ff8d50c43c9c6d3f81dc84315564ef6cc421b1a1cf4c77cdaac33</citedby><cites>FETCH-LOGICAL-c293t-1ba395f21347ff8d50c43c9c6d3f81dc84315564ef6cc421b1a1cf4c77cdaac33</cites><orcidid>0000-0001-9745-5404 ; 0000-0001-6557-2286 ; 0000-0002-7797-3041</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8457247$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,777,781,793,27905,27906,54739</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/8457247$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Gou, Shilong</creatorcontrib><creatorcontrib>Dong, Gang</creatorcontrib><creatorcontrib>Mei, Zheng</creatorcontrib><creatorcontrib>Yang, Yintang</creatorcontrib><title>Accurate Inductance Modeling of 3-D Inductor Based on TSV</title><title>IEEE microwave and wireless components letters</title><addtitle>LMWC</addtitle><description>In this letter, an accurate model for the inductance of 3-D integrated inductor based on through silicon via is proposed. The model, considering both the internal inductance and detailed calculation of redistribution layer inductance, can more precisely obtain the total inductance of 3-D inductor using negligible computational time. Compared with the results of the Q3D extractor, the inductance results obtained from the proposed model exhibit good agreement with various design parameter ranges. The maximum error is less than 3.5%, so our model achieves high accuracy.</description><subject>3-D integrated inductor</subject><subject>Computational modeling</subject><subject>Computing time</subject><subject>Design parameters</subject><subject>Inductance</subject><subject>inductance model</subject><subject>Inductors</subject><subject>Integrated circuits</subject><subject>Interconnections</subject><subject>Model accuracy</subject><subject>redistribution layers (RDL)</subject><subject>Silicon</subject><subject>Solid modeling</subject><subject>Three dimensional models</subject><subject>through silicon via (TSV)</subject><subject>Through-silicon vias</subject><subject>Wireless communication</subject><issn>1531-1309</issn><issn>2771-957X</issn><issn>1558-1764</issn><issn>2771-9588</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1LAzEQhoMoWKs_QLwEPG_NJNlNcqz1q9DiwarHkM4m0lI3Ndk9-O_dpcXTDMzzzgwPIdfAJgDM3C2Wn7MJZ6AnXFeKaXNCRlCWugBVydOhF1CAYOacXOS8ZQykljAiZorYJdd6Om_qDlvXoKfLWPvdpvmiMVBRPBxHMdF7l31NY0NXbx-X5Cy4XfZXxzom70-Pq9lLsXh9ns-miwK5EW0BaydMGTgIqULQdclQCjRY1SJoqFFL0f9ZSR8qRMlhDQ4wSFQKa-dQiDG5Pezdp_jT-dzabexS05-0HECBVkaonoIDhSnmnHyw-7T5dunXArODITsYsoMhezTUZ24OmY33_p_XslRcKvEHC-lf7w</recordid><startdate>20181001</startdate><enddate>20181001</enddate><creator>Gou, Shilong</creator><creator>Dong, Gang</creator><creator>Mei, Zheng</creator><creator>Yang, Yintang</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0001-9745-5404</orcidid><orcidid>https://orcid.org/0000-0001-6557-2286</orcidid><orcidid>https://orcid.org/0000-0002-7797-3041</orcidid></search><sort><creationdate>20181001</creationdate><title>Accurate Inductance Modeling of 3-D Inductor Based on TSV</title><author>Gou, Shilong ; Dong, Gang ; Mei, Zheng ; Yang, Yintang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-1ba395f21347ff8d50c43c9c6d3f81dc84315564ef6cc421b1a1cf4c77cdaac33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>3-D integrated inductor</topic><topic>Computational modeling</topic><topic>Computing time</topic><topic>Design parameters</topic><topic>Inductance</topic><topic>inductance model</topic><topic>Inductors</topic><topic>Integrated circuits</topic><topic>Interconnections</topic><topic>Model accuracy</topic><topic>redistribution layers (RDL)</topic><topic>Silicon</topic><topic>Solid modeling</topic><topic>Three dimensional models</topic><topic>through silicon via (TSV)</topic><topic>Through-silicon vias</topic><topic>Wireless communication</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gou, Shilong</creatorcontrib><creatorcontrib>Dong, Gang</creatorcontrib><creatorcontrib>Mei, Zheng</creatorcontrib><creatorcontrib>Yang, Yintang</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE microwave and wireless components letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Gou, Shilong</au><au>Dong, Gang</au><au>Mei, Zheng</au><au>Yang, Yintang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Accurate Inductance Modeling of 3-D Inductor Based on TSV</atitle><jtitle>IEEE microwave and wireless components letters</jtitle><stitle>LMWC</stitle><date>2018-10-01</date><risdate>2018</risdate><volume>28</volume><issue>10</issue><spage>900</spage><epage>902</epage><pages>900-902</pages><issn>1531-1309</issn><issn>2771-957X</issn><eissn>1558-1764</eissn><eissn>2771-9588</eissn><coden>IMWCBJ</coden><abstract>In this letter, an accurate model for the inductance of 3-D integrated inductor based on through silicon via is proposed. The model, considering both the internal inductance and detailed calculation of redistribution layer inductance, can more precisely obtain the total inductance of 3-D inductor using negligible computational time. Compared with the results of the Q3D extractor, the inductance results obtained from the proposed model exhibit good agreement with various design parameter ranges. The maximum error is less than 3.5%, so our model achieves high accuracy.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LMWC.2018.2867089</doi><tpages>3</tpages><orcidid>https://orcid.org/0000-0001-9745-5404</orcidid><orcidid>https://orcid.org/0000-0001-6557-2286</orcidid><orcidid>https://orcid.org/0000-0002-7797-3041</orcidid></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 1531-1309
ispartof IEEE microwave and wireless components letters, 2018-10, Vol.28 (10), p.900-902
issn 1531-1309
2771-957X
1558-1764
2771-9588
language eng
recordid cdi_ieee_primary_8457247
source IEEE Electronic Library (IEL)
subjects 3-D integrated inductor
Computational modeling
Computing time
Design parameters
Inductance
inductance model
Inductors
Integrated circuits
Interconnections
Model accuracy
redistribution layers (RDL)
Silicon
Solid modeling
Three dimensional models
through silicon via (TSV)
Through-silicon vias
Wireless communication
title Accurate Inductance Modeling of 3-D Inductor Based on TSV
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-20T19%3A11%3A34IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Accurate%20Inductance%20Modeling%20of%203-D%20Inductor%20Based%20on%20TSV&rft.jtitle=IEEE%20microwave%20and%20wireless%20components%20letters&rft.au=Gou,%20Shilong&rft.date=2018-10-01&rft.volume=28&rft.issue=10&rft.spage=900&rft.epage=902&rft.pages=900-902&rft.issn=1531-1309&rft.eissn=1558-1764&rft.coden=IMWCBJ&rft_id=info:doi/10.1109/LMWC.2018.2867089&rft_dat=%3Cproquest_RIE%3E2117187937%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2117187937&rft_id=info:pmid/&rft_ieee_id=8457247&rfr_iscdi=true