Application of Single-Pulse Charge Pumping Method on Evaluation of Indium Gallium Zinc Oxide Thin-Film Transistors

A novel single-pulse charge pumping (SPCP) method was proposed and implemented to profile the density of states (DOSs) in metal-oxide-semiconductor thin-film transistors (TFTs). The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide...

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Veröffentlicht in:IEEE transactions on electron devices 2018-09, Vol.65 (9), p.3786-3790
Hauptverfasser: Nguyen, Manh-Cuong, Nguyen, An Hoang Thuy, Ji, Hyungmin, Cheon, Jonggyu, Kim, Jin-Hyun, Yu, Kyoung-Moon, Cho, Seong-Yong, Kim, Sang-Woo, Choi, Rino
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container_end_page 3790
container_issue 9
container_start_page 3786
container_title IEEE transactions on electron devices
container_volume 65
creator Nguyen, Manh-Cuong
Nguyen, An Hoang Thuy
Ji, Hyungmin
Cheon, Jonggyu
Kim, Jin-Hyun
Yu, Kyoung-Moon
Cho, Seong-Yong
Kim, Sang-Woo
Choi, Rino
description A novel single-pulse charge pumping (SPCP) method was proposed and implemented to profile the density of states (DOSs) in metal-oxide-semiconductor thin-film transistors (TFTs). The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide TFTs. The DOSs, including oxygen vacancy donorlike states and band tail states, were characterized successfully with high resolution. This method has all the advantages of the conventional CP method and single-pulse characterization.
doi_str_mv 10.1109/TED.2018.2859224
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The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide TFTs. The DOSs, including oxygen vacancy donorlike states and band tail states, were characterized successfully with high resolution. 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The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide TFTs. The DOSs, including oxygen vacancy donorlike states and band tail states, were characterized successfully with high resolution. 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The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide TFTs. The DOSs, including oxygen vacancy donorlike states and band tail states, were characterized successfully with high resolution. This method has all the advantages of the conventional CP method and single-pulse characterization.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TED.2018.2859224</doi><tpages>5</tpages></addata></record>
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subjects Band tail
charge pumping (CP)
conduction band edge
Conduction bands
Current measurement
Density of states
density of states (DOSs)
Dielectrics
Electron traps
Gallium
Indium
Indium gallium zinc oxide
indium gallium zinc oxide (IGZO)
Logic gates
metal–oxide (MO)–semiconductor
MOSFET
oxygen vacancy
Pumping
Resistance
Semiconductor devices
single pulse
Thin film transistors
thin-film transistor (TFT)
Transistors
trap density
trap profiling
Zinc oxide
Zinc oxides
title Application of Single-Pulse Charge Pumping Method on Evaluation of Indium Gallium Zinc Oxide Thin-Film Transistors
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