Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation
Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation...
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| Veröffentlicht in: | IEEE photonics technology letters 2000-05, Vol.12 (5), p.462-464 |
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| container_end_page | 464 |
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| container_issue | 5 |
| container_start_page | 462 |
| container_title | IEEE photonics technology letters |
| container_volume | 12 |
| creator | Young-Gu Ju Lofgreen, D. Fiore, A. Syn-Yem Hu Hegblom, E. Louderback, D. Sjolund, O. Huntington, A. Coldren, L.A. |
| description | Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays. |
| doi_str_mv | 10.1109/68.841253 |
| format | Article |
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High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.</description><identifier>ISSN: 1041-1135</identifier><identifier>EISSN: 1941-0174</identifier><identifier>DOI: 10.1109/68.841253</identifier><identifier>CODEN: IPTLEL</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Arrays ; Channels ; Fiber lasers ; Laser tuning ; Optical arrays ; Optical surface waves ; Optical transmitters ; Oxidation ; Photonics ; Semiconductor laser arrays ; Surface emitting lasers ; Vertical cavity surface emission lasers ; Vertical cavity surface emitting lasers ; Wavelength division multiplexing ; Wavelengths ; Wet oxidation</subject><ispartof>IEEE photonics technology letters, 2000-05, Vol.12 (5), p.462-464</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2000</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c405t-ea83e4bf2ec70e65cda8791693739094af674c0a13a90c39fd35185e09efb7c83</citedby><cites>FETCH-LOGICAL-c405t-ea83e4bf2ec70e65cda8791693739094af674c0a13a90c39fd35185e09efb7c83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/841253$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/841253$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Young-Gu Ju</creatorcontrib><creatorcontrib>Lofgreen, D.</creatorcontrib><creatorcontrib>Fiore, A.</creatorcontrib><creatorcontrib>Syn-Yem Hu</creatorcontrib><creatorcontrib>Hegblom, E.</creatorcontrib><creatorcontrib>Louderback, D.</creatorcontrib><creatorcontrib>Sjolund, O.</creatorcontrib><creatorcontrib>Huntington, A.</creatorcontrib><creatorcontrib>Coldren, L.A.</creatorcontrib><title>Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation</title><title>IEEE photonics technology letters</title><addtitle>LPT</addtitle><description>Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.</description><subject>Arrays</subject><subject>Channels</subject><subject>Fiber lasers</subject><subject>Laser tuning</subject><subject>Optical arrays</subject><subject>Optical surface waves</subject><subject>Optical transmitters</subject><subject>Oxidation</subject><subject>Photonics</subject><subject>Semiconductor laser arrays</subject><subject>Surface emitting lasers</subject><subject>Vertical cavity surface emission lasers</subject><subject>Vertical cavity surface emitting lasers</subject><subject>Wavelength division multiplexing</subject><subject>Wavelengths</subject><subject>Wet oxidation</subject><issn>1041-1135</issn><issn>1941-0174</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2000</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp90T1PwzAQBuAIgUT5GFiZLAYEQ4od27E9ovIpVWKBOTqcCxjSONhpoRI_HkMrBgYmv9I9ek_WZdkBo2PGqDkr9VgLVki-kY2YESynTInNlGnKjHG5ne3E-EIpE5KLUfZ5gV3Edkl6sK9Yk94hic_Qp7jAMDgLbW5h4YYlifPQgMUcZ24YXPdEWogYCIQAS-I660PvA_xMgAypIqQS32Feu1la4nwHLXnHgfgPVyfnu71sq4E24v763c0eri7vJzf59O76dnI-za2gcsgRNEfx2BRoFcVS2hq0Mqw0XHFDjYCmVMJSYBwMtdw0NZdMS6QGm0dlNd_Njle9ffBvc4xDNXPRYttCh34eq0IXouRSJHjyL2SlYtwU1KhEj_7QFz8P6Yux0loYJWT5vfh0hWzwMQZsqj64GYRlxWj1fa-q1NXqXskerqxDxF-3Hn4Btf2Rhw</recordid><startdate>20000501</startdate><enddate>20000501</enddate><creator>Young-Gu Ju</creator><creator>Lofgreen, D.</creator><creator>Fiore, A.</creator><creator>Syn-Yem Hu</creator><creator>Hegblom, E.</creator><creator>Louderback, D.</creator><creator>Sjolund, O.</creator><creator>Huntington, A.</creator><creator>Coldren, L.A.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation. Eight channels are integrated into a circle of 60 μm in diameter. Seven channels are found to operate as lasers. The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/68.841253</doi><tpages>3</tpages></addata></record> |
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| identifier | ISSN: 1041-1135 |
| ispartof | IEEE photonics technology letters, 2000-05, Vol.12 (5), p.462-464 |
| issn | 1041-1135 1941-0174 |
| language | eng |
| recordid | cdi_ieee_primary_841253 |
| source | IEEE Electronic Library (IEL) |
| subjects | Arrays Channels Fiber lasers Laser tuning Optical arrays Optical surface waves Optical transmitters Oxidation Photonics Semiconductor laser arrays Surface emitting lasers Vertical cavity surface emission lasers Vertical cavity surface emitting lasers Wavelength division multiplexing Wavelengths Wet oxidation |
| title | Densely packed pie shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation |
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