One mask nickel micro-fabricated reed relay

This paper reports on the fabrication and experimental results of a reed relay for end-course detection application. The end-course is detected by approaching an external magnet near the device. Nickel material has been chosen for the realisation of the device because of its good magnetic properties...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Roth, S., Marxer, C., Feusier, G., de Rooij, N.F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Connectors Fabrication Geometry Lithography Magnetic fields Nickel Relays Resists Springs Switches
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