Design and Fabrication of Monolithic Photonic Crystal Fiber Acoustic Sensor
Single-crystal silicon is an excellent optical and mechanical material, but its properties are compromised by the incorporation of other materials required for functionality or structural support. Here, we describe a monolithic silicon acoustic sensor based on a sensing diaphragm with an integrated...
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| Veröffentlicht in: | IEEE sensors journal 2018-10, Vol.18 (19), p.7826-7832 |
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| creator | Wong, Yu-Po Lorenzo, Simon Solgaard, Olav |
| description | Single-crystal silicon is an excellent optical and mechanical material, but its properties are compromised by the incorporation of other materials required for functionality or structural support. Here, we describe a monolithic silicon acoustic sensor based on a sensing diaphragm with an integrated photonic crystal (PC) mirror. Diaphragm deflection is measured in a Fabry-Perot resonator formed between the PC mirror and a gold coated single-mode fiber. The sensors are fabricated on standard silicon wafers by standard CMOS processing technologies, yielding monolithic, low-stress sensing diaphragms. The packaged sensor exhibits a minimum detectable pressure of 10 μPa/√(Hz) in the 8-17-kHz frequency range. |
| doi_str_mv | 10.1109/JSEN.2018.2846788 |
| format | Article |
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| issn | 1530-437X 1558-1748 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | acoustic sensor Acoustic sensors Acoustics CMOS Crystal fibers Diaphragms (mechanics) Electron tubes Fabry-Perot Frequency ranges Gold Gold coatings Mechanical sensors Mirrors Optical properties photonic crystal Photonic crystals Silicon Single crystals |
| title | Design and Fabrication of Monolithic Photonic Crystal Fiber Acoustic Sensor |
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