Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices
Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of dif...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2018-10, Vol.65 (10), p.1914-1924 |
|---|---|
| Hauptverfasser: | , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1924 |
|---|---|
| container_issue | 10 |
| container_start_page | 1914 |
| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| container_volume | 65 |
| creator | Chauhan, Vikrant Mayer, Markus Mayer, Elena Ruile, Werner Ebner, Thomas Bleyl, Ingo Wagner, Karl C. Weigel, Robert Mayer, Andreas P. Hagelauer, Amelie |
| description | Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail. |
| doi_str_mv | 10.1109/TUFFC.2018.2832283 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_ieee_</sourceid><recordid>TN_cdi_ieee_primary_8353434</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>8353434</ieee_id><sourcerecordid>2068340794</sourcerecordid><originalsourceid>FETCH-LOGICAL-c395t-d50e009c2d259719569c61698ff311c870e610809f35405d5e2bad49b27d9f503</originalsourceid><addsrcrecordid>eNpdkVFr2zAQx8XYaNOuX2CDYdhLX5yeJMvWPZZkaQNZ87CUPgrHOm8qjtVJdmHfvkqT9mFI4g7ud3_u9GfsC4cp54BXm_vFYjYVwPVUaCnS-8AmXAmVa1TqI5uA1iqXwOGUncX4CMCLAsUJOxWIKBH1hLll_0xxcL_rwfk-S3fzxwWbr4OlkC37gcLO27E7lOcuDj7s05jNR8oGn_2sE-LqLrvzfed6qoMbHMXMJaVZ_uv6IZvTs2sofmaf2rqLdHGM5-x-8WMzu81X65vl7HqVNxLVkFsFBICNsEJhxVGV2JS8RN22kvNGV0AlBw3YSlWAsorEtrYFbkVlsVUgz9nlQfcp-L9j2s3sXGyo6-qe_BiNgFLLAiosEvr9P_TRj6FP0xnBeZXGUHxPiQPVBB9joNY8Bberwz_DweyNMK9GmL0R5mhEavp2lB63O7LvLW8_n4CvB8AR0XtZSyWLdF4Acv2Ldg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2117009514</pqid></control><display><type>article</type><title>Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices</title><source>IEEE Electronic Library (IEL)</source><creator>Chauhan, Vikrant ; Mayer, Markus ; Mayer, Elena ; Ruile, Werner ; Ebner, Thomas ; Bleyl, Ingo ; Wagner, Karl C. ; Weigel, Robert ; Mayer, Andreas P. ; Hagelauer, Amelie</creator><creatorcontrib>Chauhan, Vikrant ; Mayer, Markus ; Mayer, Elena ; Ruile, Werner ; Ebner, Thomas ; Bleyl, Ingo ; Wagner, Karl C. ; Weigel, Robert ; Mayer, Andreas P. ; Hagelauer, Amelie</creatorcontrib><description>Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.</description><identifier>ISSN: 0885-3010</identifier><identifier>EISSN: 1525-8955</identifier><identifier>DOI: 10.1109/TUFFC.2018.2832283</identifier><identifier>PMID: 29993998</identifier><identifier>CODEN: ITUCER</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>Computer simulation ; Data models ; Devices ; Electrodes ; Finite element analysis ; Finite element method ; Frequency measurement ; Geometrical and material nonlinearity ; Intermodulation ; Lithium niobates ; Mathematical models ; Metallization ; Metallizing ; Nonlinear programming ; Nonlinearity ; Perturbation methods ; Perturbation theory ; Piezoelectricity ; Scaling factors ; Silicon dioxide ; Simulation ; Substrates ; Surface acoustic wave devices ; Surface acoustic waves ; temperature compensated surface acoustic wave (SAW) ; third-order intermodulation products</subject><ispartof>IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2018-10, Vol.65 (10), p.1914-1924</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2018</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c395t-d50e009c2d259719569c61698ff311c870e610809f35405d5e2bad49b27d9f503</citedby><cites>FETCH-LOGICAL-c395t-d50e009c2d259719569c61698ff311c870e610809f35405d5e2bad49b27d9f503</cites><orcidid>0000-0002-0962-2872 ; 0000-0002-4510-7958 ; 0000-0002-3131-1800 ; 0000-0001-9113-9531</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8353434$$EHTML$$P50$$Gieee$$Hfree_for_read</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/29993998$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Chauhan, Vikrant</creatorcontrib><creatorcontrib>Mayer, Markus</creatorcontrib><creatorcontrib>Mayer, Elena</creatorcontrib><creatorcontrib>Ruile, Werner</creatorcontrib><creatorcontrib>Ebner, Thomas</creatorcontrib><creatorcontrib>Bleyl, Ingo</creatorcontrib><creatorcontrib>Wagner, Karl C.</creatorcontrib><creatorcontrib>Weigel, Robert</creatorcontrib><creatorcontrib>Mayer, Andreas P.</creatorcontrib><creatorcontrib>Hagelauer, Amelie</creatorcontrib><title>Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices</title><title>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</title><addtitle>T-UFFC</addtitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><description>Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.</description><subject>Computer simulation</subject><subject>Data models</subject><subject>Devices</subject><subject>Electrodes</subject><subject>Finite element analysis</subject><subject>Finite element method</subject><subject>Frequency measurement</subject><subject>Geometrical and material nonlinearity</subject><subject>Intermodulation</subject><subject>Lithium niobates</subject><subject>Mathematical models</subject><subject>Metallization</subject><subject>Metallizing</subject><subject>Nonlinear programming</subject><subject>Nonlinearity</subject><subject>Perturbation methods</subject><subject>Perturbation theory</subject><subject>Piezoelectricity</subject><subject>Scaling factors</subject><subject>Silicon dioxide</subject><subject>Simulation</subject><subject>Substrates</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>temperature compensated surface acoustic wave (SAW)</subject><subject>third-order intermodulation products</subject><issn>0885-3010</issn><issn>1525-8955</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><sourceid>ESBDL</sourceid><sourceid>RIE</sourceid><recordid>eNpdkVFr2zAQx8XYaNOuX2CDYdhLX5yeJMvWPZZkaQNZ87CUPgrHOm8qjtVJdmHfvkqT9mFI4g7ud3_u9GfsC4cp54BXm_vFYjYVwPVUaCnS-8AmXAmVa1TqI5uA1iqXwOGUncX4CMCLAsUJOxWIKBH1hLll_0xxcL_rwfk-S3fzxwWbr4OlkC37gcLO27E7lOcuDj7s05jNR8oGn_2sE-LqLrvzfed6qoMbHMXMJaVZ_uv6IZvTs2sofmaf2rqLdHGM5-x-8WMzu81X65vl7HqVNxLVkFsFBICNsEJhxVGV2JS8RN22kvNGV0AlBw3YSlWAsorEtrYFbkVlsVUgz9nlQfcp-L9j2s3sXGyo6-qe_BiNgFLLAiosEvr9P_TRj6FP0xnBeZXGUHxPiQPVBB9joNY8Bberwz_DweyNMK9GmL0R5mhEavp2lB63O7LvLW8_n4CvB8AR0XtZSyWLdF4Acv2Ldg</recordid><startdate>20181001</startdate><enddate>20181001</enddate><creator>Chauhan, Vikrant</creator><creator>Mayer, Markus</creator><creator>Mayer, Elena</creator><creator>Ruile, Werner</creator><creator>Ebner, Thomas</creator><creator>Bleyl, Ingo</creator><creator>Wagner, Karl C.</creator><creator>Weigel, Robert</creator><creator>Mayer, Andreas P.</creator><creator>Hagelauer, Amelie</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>ESBDL</scope><scope>RIA</scope><scope>RIE</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>L7M</scope><scope>7X8</scope><orcidid>https://orcid.org/0000-0002-0962-2872</orcidid><orcidid>https://orcid.org/0000-0002-4510-7958</orcidid><orcidid>https://orcid.org/0000-0002-3131-1800</orcidid><orcidid>https://orcid.org/0000-0001-9113-9531</orcidid></search><sort><creationdate>20181001</creationdate><title>Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices</title><author>Chauhan, Vikrant ; Mayer, Markus ; Mayer, Elena ; Ruile, Werner ; Ebner, Thomas ; Bleyl, Ingo ; Wagner, Karl C. ; Weigel, Robert ; Mayer, Andreas P. ; Hagelauer, Amelie</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c395t-d50e009c2d259719569c61698ff311c870e610809f35405d5e2bad49b27d9f503</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Computer simulation</topic><topic>Data models</topic><topic>Devices</topic><topic>Electrodes</topic><topic>Finite element analysis</topic><topic>Finite element method</topic><topic>Frequency measurement</topic><topic>Geometrical and material nonlinearity</topic><topic>Intermodulation</topic><topic>Lithium niobates</topic><topic>Mathematical models</topic><topic>Metallization</topic><topic>Metallizing</topic><topic>Nonlinear programming</topic><topic>Nonlinearity</topic><topic>Perturbation methods</topic><topic>Perturbation theory</topic><topic>Piezoelectricity</topic><topic>Scaling factors</topic><topic>Silicon dioxide</topic><topic>Simulation</topic><topic>Substrates</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>temperature compensated surface acoustic wave (SAW)</topic><topic>third-order intermodulation products</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chauhan, Vikrant</creatorcontrib><creatorcontrib>Mayer, Markus</creatorcontrib><creatorcontrib>Mayer, Elena</creatorcontrib><creatorcontrib>Ruile, Werner</creatorcontrib><creatorcontrib>Ebner, Thomas</creatorcontrib><creatorcontrib>Bleyl, Ingo</creatorcontrib><creatorcontrib>Wagner, Karl C.</creatorcontrib><creatorcontrib>Weigel, Robert</creatorcontrib><creatorcontrib>Mayer, Andreas P.</creatorcontrib><creatorcontrib>Hagelauer, Amelie</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE Open Access Journals</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Chauhan, Vikrant</au><au>Mayer, Markus</au><au>Mayer, Elena</au><au>Ruile, Werner</au><au>Ebner, Thomas</au><au>Bleyl, Ingo</au><au>Wagner, Karl C.</au><au>Weigel, Robert</au><au>Mayer, Andreas P.</au><au>Hagelauer, Amelie</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices</atitle><jtitle>IEEE transactions on ultrasonics, ferroelectrics, and frequency control</jtitle><stitle>T-UFFC</stitle><addtitle>IEEE Trans Ultrason Ferroelectr Freq Control</addtitle><date>2018-10-01</date><risdate>2018</risdate><volume>65</volume><issue>10</issue><spage>1914</spage><epage>1924</epage><pages>1914-1924</pages><issn>0885-3010</issn><eissn>1525-8955</eissn><coden>ITUCER</coden><abstract>Nonlinearity can give rise to intermodulation distortions in surface acoustic wave (SAW) devices operating at high input power levels. To understand such undesired effects, a finite element method (FEM) simulation model in combination with a perturbation theory is applied to find out the role of different materials and higher order nonlinear tensor data for the nonlinearities in such acoustic devices. At high power, the SAW devices containing metal, piezoelectric substrate, and temperature compensating (TC) layers are subject to complicated geometrical, material, and other nonlinearities. In this paper, third-order nonlinearities in TC-SAW devices are investigated. The materials used are LiNbO 3 -rot128YX as the substrate and copper electrodes covered with a SiO 2 film as the TC layer. An effective nonlinearity constant for a given system is determined by comparison of nonlinear P-matrix simulations to third-order intermodulation measurements of test filters in a first step. By employing these constants from different systems, i.e., different metallization ratios, in nonlinear periodic P-matrix simulations, a direct comparison to nonlinear periodic FEM-simulations yields scaling factors for the materials used. Thus, the contribution of the different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of metal electrodes, substrate, and TC film are discussed in detail.</abstract><cop>United States</cop><pub>IEEE</pub><pmid>29993998</pmid><doi>10.1109/TUFFC.2018.2832283</doi><tpages>11</tpages><orcidid>https://orcid.org/0000-0002-0962-2872</orcidid><orcidid>https://orcid.org/0000-0002-4510-7958</orcidid><orcidid>https://orcid.org/0000-0002-3131-1800</orcidid><orcidid>https://orcid.org/0000-0001-9113-9531</orcidid><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0885-3010 |
| ispartof | IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2018-10, Vol.65 (10), p.1914-1924 |
| issn | 0885-3010 1525-8955 |
| language | eng |
| recordid | cdi_ieee_primary_8353434 |
| source | IEEE Electronic Library (IEL) |
| subjects | Computer simulation Data models Devices Electrodes Finite element analysis Finite element method Frequency measurement Geometrical and material nonlinearity Intermodulation Lithium niobates Mathematical models Metallization Metallizing Nonlinear programming Nonlinearity Perturbation methods Perturbation theory Piezoelectricity Scaling factors Silicon dioxide Simulation Substrates Surface acoustic wave devices Surface acoustic waves temperature compensated surface acoustic wave (SAW) third-order intermodulation products |
| title | Investigation on Third-Order Intermodulation Distortions Due to Material Nonlinearities in TC-SAW Devices |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-18T05%3A04%3A35IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_ieee_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Investigation%20on%20Third-Order%20Intermodulation%20Distortions%20Due%20to%20Material%20Nonlinearities%20in%20TC-SAW%20Devices&rft.jtitle=IEEE%20transactions%20on%20ultrasonics,%20ferroelectrics,%20and%20frequency%20control&rft.au=Chauhan,%20Vikrant&rft.date=2018-10-01&rft.volume=65&rft.issue=10&rft.spage=1914&rft.epage=1924&rft.pages=1914-1924&rft.issn=0885-3010&rft.eissn=1525-8955&rft.coden=ITUCER&rft_id=info:doi/10.1109/TUFFC.2018.2832283&rft_dat=%3Cproquest_ieee_%3E2068340794%3C/proquest_ieee_%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2117009514&rft_id=info:pmid/29993998&rft_ieee_id=8353434&rfr_iscdi=true |