Theory of the single contact electron beam induced current effect

All publications on the single contact electron beam induced current (SC-EBIC) technique so far have been concerned with the application of the technique. This paper seeks to examine the theory behind the technique and supports it with experimental observation. It will be shown that the technique ca...

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Veröffentlicht in:	IEEE transactions on electron devices 2000-04, Vol.47 (4), p.897-899
Hauptverfasser:	Ong, V.K.S., Lau, K.T., Ma, J.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Contact Devices Documents Electron beam induced current Ion beams Laser beams Scanning Semiconductor devices
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