Importance of repeller voltage on ion current generation in an arc ion source

Summary form only given. In an earlier study, we evaluated the importance of varying the magnetic field profile in the ELS source (Vandenberg et al., 1998). Here, we study the influence of the repeller voltage. A floating repeller will acquire a steady-state voltage close to the cathode voltage. A m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Vanderberg, B.H., Horsky, T.N.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Cathodes Electrons Ion sources Magnetic confinement Magnetic fields Plasma confinement Plasma properties Stability Steady-state Voltage
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