Beam characterizations of mass separated, low-energy positive and negative ions deposition apparatus

The authors study properties of positive and negative ion beams mainly focused on the characterizations of the ion beam energy on a newly developed apparatus for isotopically mass separated, low-energy, positive and negative ions deposition. In the positive ion beam line, a plasma potential inside t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tsubouchi, N., Horino, Y., Wada, M., Oomori, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Fault location Fluctuations Ion beams Ion sources Magnetic fields Magnetic separation Physics Plasma properties Plasma sources Sputtering
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