The excess energy of a low-energy ion beam extracted from a source plasma containing negative ions

A very low-energy ion beam of an energy level less than 100 eV needs exact evaluation for the energy value. Its energy value is inaccurate unless the plasma potential is taken into account with its total energy. The plasma potential causes the excess energy of a very low-energy ion beam. In this pap...

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Bibliographische Detailangaben

Hauptverfasser:	Sakudo, N., Hayashi, K., Kawasaki, A., Ikenaga, N., Sakaguchi, N., Fujimura, K., Moriike, T., Okada, M., Maesaka, T., Ito, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemicals Electrons Ion beams Ion sources Plasma accelerators Plasma applications Plasma properties Plasma sources Plasma temperature Potential energy
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