Integrated optical waveguide components fabricated by LIGA technique

The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Paatzsch, T., Bauer, H.-D., Gaudron, A., Jobst, B., Stadler, S., Popp, M., Smaglinski, I., Ehrfeld, W.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Application software Concurrent computing Integrated optics Optical device fabrication Optical devices Optical polymers Optical waveguide components Optical waveguides Precision engineering Production
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