Integrated optical waveguide components fabricated by LIGA technique

Integrated optical waveguide components fabricated by LIGA technique

The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-e...

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Hauptverfasser: Paatzsch, T., Bauer, H.-D., Gaudron, A., Jobst, B., Stadler, S., Popp, M., Smaglinski, I., Ehrfeld, W.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Application software
Concurrent computing
Integrated optics
Optical device fabrication
Optical devices
Optical polymers
Optical waveguide components
Optical waveguides
Precision engineering
Production
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Beschreibung
Zusammenfassung:The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.1999.811893